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Deposition equipment

A technology of deposition equipment and deposition source, applied in the direction of ion implantation plating, coating, electrical components, etc., can solve the problem of sensor unit failure and so on

Active Publication Date: 2014-10-15
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the sensor unit fails

Method used

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  • Deposition equipment
  • Deposition equipment
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Embodiment Construction

[0035] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0036] figure 1 is a view illustrating a deposition apparatus according to an exemplary embodiment of the present disclosure.

[0037] refer to figure 1 , the deposition apparatus 100 includes a vacuum chamber 10 , a deposition source 110 , a substrate 120 and a sensor device 130 .

[0038] The vacuum chamber 10 reduces or prevents entry of foreign substances, and maintains a high vacuum state to ensure linearity of deposited materials.

[0039] The deposition source 110 is located at a lower portion of the vacuum chamber 10 . For the sake of illustration, in figure 1 Only one deposition source 110 is shown in , although the number of deposition sources is not limited to one. A deposition material such as an organic material, a metal material, etc. is contained in the deposition source 110 and is to be deposited onto the substrate 120 . The ...

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Abstract

Deposition equipment comprises: a substrate supporting element configured to support a substrate; a deposition source configured to supply a deposition material; a sensor unit configured to sense deposition of the deposition material; a first anti-attaching plate coupled to the sensor unit and comprising one or more first magnetic units; a second anti-attaching plate coupled to the sensor unit and comprising one or more second magnetic units; and a third anti-attaching plate coupled to the first anti-attaching plate and the second anti-attaching plate and arranged below the sensor unit and comprising one or more third magnetic units, wherein the first anti-attaching plate, the second anti-attaching plate, and the third anti-attaching plate are coupled with each other through the first magnetic units, the second magnetic units and the third magnetic units and adjacent to the magnetic units in the first magnetic units, the second magnetic units and the third magnetic units, and wherein, the first anti-attaching plate, the second anti-attaching plate and the third anti-attaching plate jointly cover a part of the sensor part.

Description

[0001] This patent application claims priority and benefit from Korean Patent Application No. 10-2013-0036529 filed on Apr. 3, 2013, the entire contents of which are hereby incorporated by reference. technical field [0002] The present disclosure relates to deposition apparatus. Background technique [0003] In recent years, an organic light emitting display has been highlighted as a next-generation display device because of its excellent brightness and viewing angle and because it does not need to include a separate light source when compared with a liquid crystal display. Therefore, the organic light emitting display has the advantage of being slim and lightweight. In addition, organic light emitting displays have characteristics such as fast response speed, low power consumption, high brightness, and the like. [0004] An organic light emitting display includes an organic light emitting device including an anode, an organic light emitting layer and a cathode. Holes and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/52
CPCH05B33/10H10K71/00H10K71/164
Inventor 金保云赵相圭吴准植金建植吴仙英
Owner SAMSUNG DISPLAY CO LTD