Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change

A technology of vacuum gate valve and analysis chamber, which is applied in the field of mass spectrometry, can solve the problems that restrict the analysis efficiency of mass spectrometers, achieve the effects of reducing the volume of the chamber, reducing the time for re-establishing vacuum, and being easy to operate

Inactive Publication Date: 2015-03-25
BEIJING RES INST OF URANIUM GEOLOGY
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  • Abstract
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  • Application Information

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Problems solved by technology

It usually takes several hours to establish the vacuum environment required for detection, which seriously restricts the analysis efficiency of mass spectrometers

Method used

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  • Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change
  • Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change
  • Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change

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Embodiment Construction

[0036] The present invention aims at the time-consuming and inefficient defect that the entire set of equipment needs to be vacuumed again after the sample is replaced in the existing mass spectrometer, and a vacuum gate valve is set in the channel between the ion source chamber and the analysis chamber of the mass spectrometer. When the sample is changed, the space in the analysis chamber is isolated, and only the ion source chamber is opened, so as to keep the vacuum environment in the analysis chamber unchanged. After the sample is changed, the ion source cavity is evacuated, which greatly reduces the time compared with the original overall evacuation, and the efficiency is effectively improved.

[0037] The present invention will be further described in detail through the accompanying drawings and specific embodiments below.

[0038] A kind of vacuum gate valve of the present invention, as figure 1 , 6 As shown, it includes the valve seat formed by the fixed plate 1 and ...

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Abstract

The invention discloses a vacuum gate valve for a mass spectrometer. The vacuum gate valve comprises a valve seat and a valve element, and a sealing ring is arranged between the valve seat and the valve element. The valve element is provided with a squeezing mechanism used for enabling the valve element to tightly press the sealing ring. The invention further discloses a mass spectrometry instrument, the mass spectrometry instrument comprises an ion source cavity and an analysis chamber which is communicated with the ion source cavity, and a communicated channel of the ion source cavity and the analysis chamber is provided with the vacuum gate valve. In addition, the invention discloses a method for establishing a high vacuum environment in mass spectrometry sample change. The method includes the steps that the communicated channel of the ion source cavity and the analysis chamber is closed through the vacuum gate valve, the ion source cavity is opened for changing samples, after the samples are changed, the ion source cavity is pre-vacuumized, the vacuum gate valve is opened so that the ion source cavity and the analysis chamfer can be communicated with each other, and vacuumizing is conducted. According to the devices and the method, the vacuum needed by detection of the mass spectrometer can be established quickly after the samples are changed, the sealing effect is good, and the sample changing efficiency is high.

Description

technical field [0001] The invention relates to the field of mass spectrometry, in particular to a vacuum gate valve, a mass spectrometry instrument and a method for establishing a high vacuum environment in mass spectrometry sample change. Background technique [0002] A mass spectrometer generally consists of an ion source, an ion transmission system, and a mass analysis system. When working, the ion source, ion transmission system and mass analysis system require a high degree of vacuum to ensure sample ionization efficiency, ion transmission efficiency and resolution. When replacing samples, the ion source part needs to be exposed to the atmosphere, so that the pressure of the whole system frequently changes between atmospheric pressure and high vacuum. Before changing the sample, it is necessary to turn off the vacuum system of the mass spectrometer and slowly inflate the whole system; after changing the sample, turn on the vacuum pump unit of the mass spectrometer aga...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K3/02H01J49/26
CPCF16K3/02H01J49/26
Inventor 范增伟郭冬发刘桂方董晨谢胜凯谭靖
Owner BEIJING RES INST OF URANIUM GEOLOGY
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