Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change
A technology of vacuum gate valve and analysis chamber, which is applied in the field of mass spectrometry, can solve the problems that restrict the analysis efficiency of mass spectrometers, achieve the effects of reducing the volume of the chamber, reducing the time for re-establishing vacuum, and being easy to operate
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[0036] The present invention aims at the time-consuming and inefficient defect that the entire set of equipment needs to be vacuumed again after the sample is replaced in the existing mass spectrometer, and a vacuum gate valve is set in the channel between the ion source chamber and the analysis chamber of the mass spectrometer. When the sample is changed, the space in the analysis chamber is isolated, and only the ion source chamber is opened, so as to keep the vacuum environment in the analysis chamber unchanged. After the sample is changed, the ion source cavity is evacuated, which greatly reduces the time compared with the original overall evacuation, and the efficiency is effectively improved.
[0037] The present invention will be further described in detail through the accompanying drawings and specific embodiments below.
[0038] A kind of vacuum gate valve of the present invention, as figure 1 , 6 As shown, it includes the valve seat formed by the fixed plate 1 and ...
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