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56results about How to "Reduce chamber volume" patented technology

Inductively coupled plasma generator having low aspect ratio

An inductively coupled plasma generator having a lower aspect ratio reaction gas, comprising a chamber having a gas inlet through which a reaction gas is supplied, a vacuum pump for maintaining the inside of the chamber vacuum and a gas outlet for exhausting the reaction gas after completion of the reaction, a chuck for mounting a target material to be processed inside the chamber, and an antenna to which high-frequency power is applied, the antenna provided at the upper and lateral portions of the chamber, wherein the antenna has parallel antenna elements in which a discharge of a high frequency can be allowed and impedance is low to ensure a low electron temperature, the antenna is disposed such that a powered end of each of the antenna elements and a ground end of each of the antenna elements opposite to the powered end are symmetrical in view of the center of an imaginary circle formed by the antenna to establish rotation symmetry of plasma density profiles, the antenna elements are twisted in a helical manner, and the powered end of each of the antenna elements is positioned to be far from the chamber and the ground end of each of the antenna elements is positioned to be close to the chamber, thereby compensating for a drop in the plasma density due to ion loss occurring at the powered end.
Owner:SEMES CO LTD

Rubber transmission belt vulcanizing device and vulcanizing method thereof

The invention discloses a rubber driving belt vulcanizing device which comprises an outer sleeve, and an upper cover plate, a lower bottom plate and a die component which are connected with the upper end surface and the lower end surface of the outer sleeve in a sealing manner. The die component comprises a pivot holder body and a die arranged at the outer ring end of the pivot holder body, a circularly communicated steam chamber is arranged on the inner surface of the die and close to the pivot holder body, an external pressure cavity is formed between the outer sleeve and the die, and the upper cover plate is adjustably connected with the lower bottom plate through a locking bolt, an inner locking bolt and a locking nut. The vulcanizing medium in the external pressure cavity is mixed with high-pressure compressed air through saturated steam, which can ensure the vulcanizing pressure and a certain temperature, the steam chamber is arranged between the die and the outer ring end of the pivot holder body, the volume of the steam chamber is greatly reduced than the volume of the internal pressure air chamber of the prior vulcanizing boiler, so that the consumption of saturated steam is greatly reduced; therefore, the steam consumption for the boiler is low, and the energy consumption is low. The device does not need a special vulcanizing boiler, so that the equipment investment is saved.
Owner:杭州金瀚能源科技有限公司

Hydrostatic test compensator and method of carrying out pipe hydrostatic tests by using same

The invention discloses a hydrostatic test compensator. The hydrostatic test compensator is a cylinder which can bear the external pressure not less than the pressure size of the hydrostatic test for a pipe without damage; the cylinder is a solid cylinder or is in a hollow shell structure with the two ends sealed by adopting sealing heads. The invention also discloses a method of carrying out pipe hydrostatic tests, and the method comprises following steps: propelling the hydrostatic test compensator into a pipe to be tested, then fixing the pipe to be tested, which has been stuffed with the hydrostatic test compensator, and the hydrostatic test compensator to a hydrostatic test machine, and then carrying out hydrostatic tests according to normal methods. When the hydrostatic-test compensator is used for the hydrostatic test of the pipe, due to the capability of bearing the external pressure, the hydrostatic-test compensator is not deformed in the process of the hydrostatic test of the pipe, so that the water feeding time and the water discharging time in the hydrostatic test can be greatly reduced, and therefore the whole time for the hydrostatic test of the pipe is reduced and the efficiency of the hydrostatic test is increased.
Owner:BEIJING LONGSHINE OIL TUBULAR TECH

Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change

The invention discloses a vacuum gate valve for a mass spectrometer. The vacuum gate valve comprises a valve seat and a valve element, and a sealing ring is arranged between the valve seat and the valve element. The valve element is provided with a squeezing mechanism used for enabling the valve element to tightly press the sealing ring. The invention further discloses a mass spectrometry instrument, the mass spectrometry instrument comprises an ion source cavity and an analysis chamber which is communicated with the ion source cavity, and a communicated channel of the ion source cavity and the analysis chamber is provided with the vacuum gate valve. In addition, the invention discloses a method for establishing a high vacuum environment in mass spectrometry sample change. The method includes the steps that the communicated channel of the ion source cavity and the analysis chamber is closed through the vacuum gate valve, the ion source cavity is opened for changing samples, after the samples are changed, the ion source cavity is pre-vacuumized, the vacuum gate valve is opened so that the ion source cavity and the analysis chamfer can be communicated with each other, and vacuumizing is conducted. According to the devices and the method, the vacuum needed by detection of the mass spectrometer can be established quickly after the samples are changed, the sealing effect is good, and the sample changing efficiency is high.
Owner:BEIJING RES INST OF URANIUM GEOLOGY

Technologic nozzle and thermal circulation heat-insulation device for same

A thermal circulation heat-insulation device for a technologic nozzle comprises a cavity, an upper comb-shaped flow stopping plate and a lower comb-shaped flow stopping plate, wherein a heat exchanging chamber is formed in the cavity; the upper comb-shaped flow stopping plate comprises a cover plate and a plurality of upper flow stopping sheets; the lower comb-shaped flow stopping plate comprises a bottom plate and a plurality of lower flow stopping sheets; the lower flow stopping sheets and the upper flow stopping sheets are distributed in the heat exchanging chamber in a staggered manner; a circulation liquid inlet and a circulation liquid outlet are respectively formed in two ends of the cover plate; and the heat exchanging chamber, the upper comb-shaped flow stopping plate and the lower comb-shaped flow stopping plate form a snakelike heat exchanging channel. The invention also provides a technologic nozzle comprising the thermal circulation heat-insulation device. The snakelike heat exchanging pipe is used in the thermal circulation heat-insulation device, the heat exchanging area is large, the heat exchanging efficiency is high, and an external circulation liquid delivery pipeline and the inner structure of the heat-insulation device are skillful, so that the thermal circulation heat-insulation device is easy to operate. The thermal circulation heat-insulation device is arranged in the technologic nozzle, therefore, sufficient heat exchange is guaranteed, the volume of the chamber in the technologic nozzle is reduced, and the temperature of work liquid stored in the chamber is well guaranteed.
Owner:SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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