Reaction chamber positioning structure and reaction chamber

Abstract

The invention provides a reaction chamber positioning structure and a reaction chamber. The reaction chamber positioning structure facilitates positioning and installation of an upper cover of the reaction chamber and a reaction cavity and comprises a positioning pin and a spring, wherein a first positioning hole is formed in the reaction cavity, a second positioning hole is formed in the upper cover, the positioning pin is provided with a shaft shoulder for limiting the spring, the spring is arranged on the outer side of one end of the positioning pin in a sleeving mode and installed in the first positioning hole formed in the reaction cavity, the spring is compressed after the second positioning hole formed in the upper cover is aligned to the other end of the positioning pin, and the other end of the positioning pin is inserted into the second positioning hole for positioning. The reaction chamber comprises the reaction chamber positioning structure. The reaction chamber positioning structure and the reaction chamber are simple and reasonable in structural design, the height of the positioning pin is increased through matching of the spring and the positioning pin, and the upper cover and reaction chamber assembling accuracy and efficiency are improved.

Description

technical field [0001] The present invention relates to semiconductor equipment, in particular to a reaction chamber positioning structure applied to a process module of semiconductor equipment, and a reaction chamber containing the above reaction chamber positioning structure. Background technique [0002] At present, when maintaining the interior of the reaction chamber of the reaction chamber, it is necessary to remove the upper cover so as to align the internal parts for wiping or replacement. After the maintenance of the reaction chamber is completed, the upper cover (i.e. the box cover) needs to be reset. When the cover is closed, the positioning pins of the reaction chamber are inserted into the corresponding pin holes of the upper cover. Due to the limitation of space, the height of the positioning pin of the reaction chamber is relatively low, generally about 25mm. When the upper cover moves down to match the positioning pin of the reaction chamber, the distance bet...

AI Technical Summary

Problems solved by technology

[0004] Based on this, it is necessary to provide a reaction chamber positioning structure that can be easily positioned during installation and a reaction chamber containing the above reaction chamber positioning structure for the problems of difficult positioning of the reaction chamber during assembly.

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