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Evaporation equipment and evaporation method

A technology of vapor deposition and equipment, applied in the field of AMOLED display, can solve the problem of easy deformation of the vapor deposition mask, etc.

Active Publication Date: 2017-11-21
KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, it is necessary to address the problem that the evaporation mask is easily deformed during use, and provide an evaporation equipment and an evaporation method that make the evaporation mask difficult to deform.

Method used

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  • Evaporation equipment and evaporation method
  • Evaporation equipment and evaporation method
  • Evaporation equipment and evaporation method

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Embodiment Construction

[0031] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0032] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used herein for purposes ...

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PUM

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Abstract

The invention relates to an evaporation equipment and an evaporation method, which are used for evaporating an AMOLED substrate. The evaporation equipment includes: a substrate stage for carrying an AMOLED substrate; The groove, the evaporation mask plate is pressed on the AMOLED substrate; the evaporation source device, adjacent to the substrate stage, is used to provide evaporation materials; the evaporation blocking device is set on the evaporation mask plate and the evaporation source device, An evaporation cavity is formed with the evaporation mask plate and the evaporation source device. In the evaporation equipment described above, the evaporation mask is attached to the AMOLED substrate by its own weight, and the evaporation material provided by the evaporation source device adheres to the AMOLED substrate due to the reflection of the evaporation blocking device after evaporation. In this way, during the evaporation process, the shape of the evaporation mask plate does not change during the evaporation process, thereby avoiding the deviation of the evaporation position or color mixing due to the inversion of the evaporation mask plate and the AMOLED substrate.

Description

technical field [0001] The invention relates to the technical field of AMOLED display, in particular to an evaporation equipment and an evaporation method. Background technique [0002] With the advancement of technology and the rapid development of the electronic industry, flat panel displays have been widely used in various fields. As market demands continue to increase, further enlargement, higher image quality, and lower power consumption of flat panel displays are required. Active Matrix / Organic Light Emitting Diode panel (Active Matrix / Organic Light Emitting Diode referred to as AMOLED) is an all-solid-state display device with advantages in low-voltage drive, high-speed response, self-luminescence, etc., and has received more and more attention. Big attention. [0003] The basic structure of AMOLED includes: substrate, thin film transistor (TFT) part, organic light emitting diode (OLED) part, packaging and so on. The organic light emitting diode part includes a hol...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24H01L21/32
Inventor 丁立薇党鹏乐朱晖张小宝
Owner KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT