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A magnetron sputtering device

A magnetron sputtering device, magnetic track technology, applied in sputtering coating, ion implantation coating, coating and other directions, can solve the problem of easy to produce abnormal discharge and so on

Inactive Publication Date: 2017-12-08
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a magnetron sputtering device, which is used to solve the problem that the magnetron sputtering device in the prior art is prone to abnormal discharge during the working process

Method used

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  • A magnetron sputtering device
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  • A magnetron sputtering device

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Embodiment Construction

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] Please refer to figure 2 and image 3 .

[0025] Such as figure 2 and image 3 As shown, a magnetron sputtering device provided by the embodiment of the present invention includes a magnetic levitation track and a carrier plate 1 that can be suspended and moved along the extension direction of the magnetic levitation track, and the carrier plate 1 is provided with a magnetic levitation track. A magnetic track 2 that generates a levitating magnetic...

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Abstract

A magnetron sputtering device is disclosed and includes a magnetic levitation track and a supporter which is levitated on the magnetic levitation track. The supporter includes a magnetic track fixed on the supporter via a plurality of pads; each of the pads includes a first insulation plate and a second insulation plate, the first insulation plate and the magnetic track are connected via a first fastener, the second insulation plate and the supporter are connected via a second fastener, and the second fastener and the first fastener are not in contact with each other; the first insulation plate and the second insulation plate are connected via a third fastener, the third fastener is not in contact with both the magnetic track and the supporter, and the third fastener is not in contact with both the first fastener and the second fastener.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a magnetron sputtering device. Background technique [0002] At present, in the field of coating, vacuum magnetron sputtering technology is widely used. An existing magnetron sputtering device is provided with a magnetic levitation track for suspending the carrier plate. The carrier plate is a metal plate carrying an object to be processed, generally an aluminum plate. A magnetic track that generates a suspended magnetic force between the tracks, the magnetic track is connected to the cavity, and the magnetic track is installed on the carrier plate through an insulating spacer. [0003] figure 1 It is a structural schematic diagram of an insulating spacer used to install the magnetic track on the carrier in the prior art; as figure 1 As shown, the insulating pad 30 is first connected to the carrier board 10 through the internal screw 40, and then connected to the magnet...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35
CPCC23C14/50C23C14/35H01J37/3405H01J37/3411
Inventor 刘海龙孙玉杰
Owner BOE TECH GRP CO LTD