Magnetron sputtering device
A magnetron sputtering device, magnetic track technology, applied in sputtering coating, ion implantation coating, coating and other directions, can solve the problem of easy to produce abnormal discharge and so on
Inactive Publication Date: 2016-04-13
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0005] The invention provides a magnetron sputtering device, which is used to solve the problem that the magnetron sputtering device in the prior art is prone to abnormal discharge during the working process
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0024] Please refer to figure 2 and image 3 .
[0025] Such as figure 2 and image 3 As shown, a magnetron sputtering device provided by the embodiment of the present invention includes a magnetic levitation track and a carrier plate 1 that can be suspended and moved along the extension direction of the magnetic levitation track, and the carrier plate 1 is provided with a magnetic levitation track. A magnetic track 2 that generates a levitating magnetic...
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The invention relates to the technical field of vacuum coating, and discloses a magnetron sputtering device which comprises a magnetic suspension rail and a carrying plate which is arranged on the magnetic suspension rail in the mode that the carrying plate can be suspended and moved in the extending direction of the magnetic suspension rail. The carrying plate is provided with a magnetic rail used for generating suspension magnetic force between the carrying plate and the magnetic suspension rail. The magnetic rail is arranged on the carrying plate through a plurality of cushion blocks. Each cushion block comprises a fist insulating plate block and a second insulating plate block which are located between the magnetic rail and the carrying plate, wherein the second insulating plate block is located between the first insulating plate block and the carrying plate. In addition, the first insulating plate blocks and the magnetic rail are fixedly connected through first fixing pieces, the second insulating plate blocks and the carrying plate are fixedly connected through second fixing pieces, and the second fixing pieces do not make contact with the first fixing pieces. The first insulating plate blocks and the second insulating plate blocks are fixedly connected through third fixing pieces which do not make contact with the magnetic rail or the carrying plate. The magnetron sputtering device is not likely to generate the abnormal discharge phenomenon in the working process.
Description
technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a magnetron sputtering device. Background technique [0002] At present, in the field of coating, vacuum magnetron sputtering technology is widely used. An existing magnetron sputtering device is provided with a magnetic levitation track for suspending the carrier plate. The carrier plate is a metal plate carrying an object to be processed, generally an aluminum plate. A magnetic track that generates a suspended magnetic force between the tracks, the magnetic track is connected to the cavity, and the magnetic track is installed on the carrier plate through an insulating spacer. [0003] figure 1 It is a structural schematic diagram of an insulating spacer used to install the magnetic track on the carrier in the prior art; as figure 1 As shown, the insulating pad 30 is first connected to the carrier board 10 through the internal screw 40, and then connected to the magnet...
Claims
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Login to View More IPC IPC(8): C23C14/35
CPCC23C14/50C23C14/35H01J37/3405H01J37/3411
Inventor 刘海龙孙玉杰
Owner BOE TECH GRP CO LTD