Alternative increment type micro-displacement measurement sensor and measurement method

Abstract

The invention discloses an alternative increment type micro-displacement measurement sensor. The alternative increment type micro-displacement measurement sensor comprises a laser beam, two reflection mirrors, a photodetector I, a photodetector II, a guide rail I, a guide rail II and a control processing system. With the adoption of the sensor, the laser beam is continuously reflected between one group of two reflection mirrors which are arranged in parallel, and is finally illuminated on the two groups of photodetectors; the distance between the two reflection mirrors is changed so that a reflection path of the laser beam is changed; each group of photodetector moves on the guide rails and the photodetector senses the laser beam; and the control processing system is used for processing according to light sensing mileages and light sensing directions of the photodetectors to obtain a detection displacement value; and the control processing system can also be used for adding or subtracting a movement distance value on the rails of the photodetectors into or by the detection displacement value, and calculating to obtain a real change value between the two reflection mirrors. The sensor disclosed by the invention is simple in structure, reliable in measurement, relatively high in precision and easy to manufacture in a large batch.

Description

technical field [0001] The invention relates to the field of precision measurement technology and instruments, in particular to an alternating incremental measurement micro-displacement sensor and a measurement method. Background technique [0002] Displacement sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. There are many ways to measure displacement. Smaller displacements (such as less than 1cm) are usually detected by strain gauges, inductances, differential transformers, eddy currents, and Hall sensors. Larger displacements (such as greater than 1cm) are usually detected by induction synchronization. Sensors, gratings, capacitive grids, magnetic grids and other sensing technologies to measure. Among them, the grating sensor has the advantages of easy digitalization, high precision (currently the highest resolution can reach the nanometer level...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to: aim at the existing grating sensors existing in the prior art due to the physical structure limitation of the photolithography process, which makes it difficult to improve the measurement accuracy and cannot meet the above-mentioned shortcomings of the increasingly high measurement accuracy requirements, and provides An alternating incremental measuring micro-displacement sensor and its measuring method. The sensor has a simple structure, is suitable for measuring the displacement change of a measured object, has reliable measurement, high precision, and is easy to realize mass production.

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