Portable combined zero-setting, high-frequency response and large-working distance auto-collimation apparatus and method thereof

A portable, high-response technology, used in precision measurement and optical engineering, it can solve the problems of inability to achieve self-collimation and micro-angle measurement, reflected beam deviation from the entrance pupil, and the range cannot be too large.

Active Publication Date: 2016-10-12
HARBIN INST OF TECH
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the la

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Portable combined zero-setting, high-frequency response and large-working distance auto-collimation apparatus and method thereof
  • Portable combined zero-setting, high-frequency response and large-working distance auto-collimation apparatus and method thereof
  • Portable combined zero-setting, high-frequency response and large-working distance auto-collimation apparatus and method thereof

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment 1

[0084] This embodiment is an embodiment of a portable combined zero-adjustment high-frequency response and large working distance self-collimation device.

[0085] The portable combined zero-adjusting high-frequency response and large working distance self-collimation device of this embodiment has a schematic structural diagram as follows figure 2 shown. The self-collimation device includes a light source 1, a reflective collimating mirror 22, a reflective mirror 3, and a feedback imaging system 6. The reflective mirror 3 is provided with an angle adjustment measuring device 4; After the straight mirror 22 is collimated into a parallel beam, it is reflected by the mirror 3 and incident on the surface of the object to be measured 5; the beam reflected from the surface of the object to be measured 5 is reflected by the mirror 3 and then collected by the feedback imaging system 6 imaging;

[0086] The feedback imaging system 6 includes an image sensor imaging system and a four...

specific Embodiment 2

[0093] This embodiment is an embodiment of a portable combined zero-adjustment high-frequency response and large working distance self-collimation device.

[0094] The portable combined zero-adjustment high-frequency response and large working distance autocollimation device of this embodiment is different from the specific embodiment 1 in the structure of the feedback imaging system 6; the structure of the feedback imaging system 6 in this embodiment is one of the following two forms A sort of:

[0095] First, the feedback imaging system 6 includes a first feedback beam splitter 61, an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, such as Image 6 The guide rail 68 has two pause positions, one pause position makes the image surface center of the image sensor 65 correspond to the focal position of the reflective collimating mirror 22, and the other pause position makes the image surface center of the four-quadrant detector 66 correspond to the ref...

specific Embodiment 3

[0097] This embodiment is an embodiment of a portable combined zero-adjustment high-frequency response and large working distance self-collimation device.

[0098] The portable combined zero-adjusting high-frequency response and large working distance self-collimation device of this embodiment has a schematic structural diagram as follows Figure 8 shown. On the basis of the specific embodiment 1, the portable combined zero-adjustment high-frequency response and large working distance auto-collimation device of this embodiment is further provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0099] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflection mirror 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected light path of the wavefront detection bea...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention belongs to the technical field of precise measurement and the field of optical engineering, and concretely relates to a portable combined zero-setting, high-frequency response and large-working distance auto-collimation apparatus and a method thereof. The apparatus is composed of a light source, a collimating mirror, a reflector and a feedback imaging system. The method comprises the following steps: the reflector is adjusted to make reflected light beams return to the center of the image plane of the feedback imaging system, and an angle deflection measuring device is used to obtain the angle change of the surface of a measured object. The reflector is arranged on a traditional auto-collimation angle measurement apparatus, so the problem of unable measurement caused by deviation of the reflected lights of the measured object from the measurement system is avoided, thereby the auto-collimation working range is greatly increased under a same working distance, or the working distance is substantially increased under a same auto-collimation working range. The concrete design of the collimating mirror, the feedback imaging system and the reflector makes the apparatus have the advantages of small size, portability and high measurement precision; and the apparatus and the method have very high measurement speed.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, in particular to a portable combined zero-adjustment high-frequency response large working distance self-collimation device and method. Background technique [0002] In the field of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology under large working distances. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can perform surface angle measurement and circular indexing measurement; the maximum workin...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01C15/00
CPCG01C15/004
Inventor 谭欣然王超谭久彬
Owner HARBIN INST OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products