Portable array zero setting high-dynamic-precision large working-distance auto-collimation device and method

Abstract

The invention belongs to the technical field of precise measurement and the field of optical engineering, and specifically relates to a portable array zero setting high-dynamic-precision large working-distance auto-collimation device and method. The device is composes of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. The method is characterized in that the reflecting mirror is adjusted to enable a reflecting light beam to be fed back to the image surface center of the feedback imaging system, and an angle deflection measuring device on the reflecting mirror is utilized to obtain the angle change of the surface of a detected object. The reflecting mirror is added to a conventional auto-collimation angle measuring system, so that the problem that light reflected by the detected object deviates from the measuring system and the measurement is unavailable is avoided, the auto-collimation working range is increased under the identical working distance, or the advantages of the working distance are increased under the identical working range; the specific design of the collimating mirror, the feedback imaging system and the reflecting mirror facilitates the miniaturization, portability and high measurement precision of the device; the assembling process of the detected object is monitored in the whole process; and rapid measurement is available.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, in particular to a portable array zeroing high dynamic precision large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hund...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Images