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Portable array zeroing high precision laser large working distance auto-collimation device and method

A portable, high-precision technology, applied in the field of precision measurement and optical engineering, it can solve the problems that self-collimation and micro-angle measurement cannot be realized, the reflected beam deviates from the entrance pupil, and the range cannot be too large, etc.

Active Publication Date: 2017-01-11
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement
[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Method used

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  • Portable array zeroing high precision laser large working distance auto-collimation device and method
  • Portable array zeroing high precision laser large working distance auto-collimation device and method
  • Portable array zeroing high precision laser large working distance auto-collimation device and method

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specific Embodiment 1

[0085] This embodiment is an embodiment of a portable array zeroing high-precision laser large working distance self-collimation device.

[0086] The portable array zeroing high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through the reflective collimator After the straight mirror 22 is collimated into a parallel beam, it is reflected by the mirror 3 and is incident on the surface of the measured object 5; the beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;

[0087]The feedback imaging system 6 is arranged between the light source 1 an...

specific Embodiment 2

[0091] This embodiment is an embodiment of a portable array zeroing high-precision laser large working distance self-collimation device.

[0092] The portable array zeroing high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 7 shown. On the basis of the specific embodiment 1, the portable array zeroing high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0093] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arra...

specific Embodiment 3

[0096] This embodiment is an embodiment of a portable array zeroing high-precision laser large working distance self-collimation device.

[0097] The portable array zeroing high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 8 shown. On the basis of the specific embodiment 1, the portable array zeroing high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0098] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector...

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Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering and specifically relates to a portable array zeroing high precision laser large working distance auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system; according to the method, via adjustment of the reflecting mirror, a reflected light beam is enabled to return to a center of an image plane of the feedback imaging system; an angular deflection measurement device on the reflecting mirror is used for obtaining angular variation of a surface of an object being tested. Because the reflecting mirror is added in a traditional auto-collimation angle measurement system, a problem that measurement cannot be realized when light reflected by the object being tested is deviated from a measurement system can be prevented; an auto-collimation working scope can be expanded while working distance remains the same or working distance is increased while the working scope remains the same; via specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the portable array zeroing high precision laser large working distance auto-collimation device is enabled to be small in size, high in portability and great in measurement precision; stability of a measurement environment can be monitored, and a technical advantage of rapid measurement can be gained.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to a portable array zeroing high-precision laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 谭欣然王超谭久彬
Owner HARBIN INST OF TECH
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