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Dresser intake system and polisher

A technology of an air intake system and a dresser, applied in the field of polishing machines, can solve the problems of inconsistency, low pressure control accuracy, and inability to dress the polishing pad, and achieve the effects of increasing service life, reducing polishing cost, and improving polishing effect.

Active Publication Date: 2018-09-04
HWATSING TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, during the control process of the dresser, the pressure control accuracy is not high when the dressing head acts on the polishing pad. make appropriate adjustments

Method used

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  • Dresser intake system and polisher
  • Dresser intake system and polisher
  • Dresser intake system and polisher

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Experimental program
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Embodiment Construction

[0028] Embodiments of the invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0029] A dresser intake system 100 according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings, and the dresser intake system 100 can be applied to a polishing machine.

[0030] The trimmer intake system 100 according to the embodiment of the present invention may include: a vacuum source, a vacuum pipeline 10, a compressed air source, a compressed air pipeline 20, a compressed air control valve 21, a trimmer 30, a pressure sensor 40, a controller 50, The main pipeline 60 , the first control valve 70 and the second control valve 80 .

[0031] Such as figure 1 and figure 2 As shown, the vacu...

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PUM

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Abstract

The invention discloses an air inlet system of a finisher and a polishing machine. The air inlet system of the finisher comprises a vacuum source, a vacuum pipeline connected with the vacuum source, a compressed air source, a compressed air pipeline connected with the compressed air source, a compressed air control valve, a finisher, a pressure sensor and a controller, wherein the compressed air control valve is used for adjusting the pressure of compressed air output by the compressed air pipeline; a loading chamber is formed inside the finisher; the loading chamber is selectively connected with the vacuum pipeline and the compressed air pipeline; the pressure sensor is used for detecting pressure of the loading chamber; and the controller adjusts the pressure of compressed air output by the compressed air pipeline through the compressed air control valve according to a detection result of the pressure sensor. According to the air inlet system, the pressure control of the finisher can be made accurate, the finisher can perform proper trimming on a polishing pad through the accurate pressure control, and the polishing effect can be improved.

Description

technical field [0001] The invention relates to the technical field of polishing equipment, in particular to a trimmer intake system and a polishing machine with the trimmer intake system. Background technique [0002] In chemical mechanical polishing equipment, as the polishing process progresses, the physical and chemical properties of the polishing pad will change, resulting in a decrease in polishing rate and polishing quality. Therefore, the polishing pad must be properly trimmed during the polishing process to improve the polishing performance of the polishing pad, increase the service life of the polishing pad, and reduce the polishing cost. However, during the control process of the dresser, the pressure control accuracy is not high when the dressing head acts on the polishing pad. Make appropriate adjustments. Contents of the invention [0003] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. The...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B53/017B24B49/16
CPCB24B49/16B24B53/017
Inventor 庞伶伶许振杰沈攀王同庆李昆路新春
Owner HWATSING TECH