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Movable lens adjustment mechanism

A lens adjustment and lens technology, which is applied in installation, optics, instruments, etc., can solve problems such as the movement of aberration compensation mechanisms, and achieve high-precision adjustment effects

Active Publication Date: 2017-03-29
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to improve the adjustment accuracy of the movable lens adjustment mechanism, so as to solve the problem of movement existing in the adjustment process of the existing aberration compensation mechanism

Method used

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Embodiment Construction

[0021] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0022] This embodiment proposes a mechanism for realizing the aberration compensation of the objective lens by adjusting the movement of the movable mirror in the X, Y and RZ directions in the lithography exposure equipment.

[0023] Such as figure 1 As shown, the movable lens adjustment mechanism of the present invention includes a lens 100 and a lens barrel 200 . Lens barrel 200 is divided into 3 parts: inner ring 210, flexible hinge mechanism 220 and outer ring 230, eyeglass 100 is fixed on the inner ring 210, outer ring 230 is the installation basis of the whole mechanism, lens barrel inner ring 210 passes through 3 uniform The flexible hinge mechanism 220 of the cloth is connected to the outer ring 230 . Such as figure 2 As shown, the flexible hinge mechanism 220 includes a tension spring 300 , a spring seat 410 , a spring seat 420 an...

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Abstract

The present invention discloses a movable lens adjustment mechanism. The movable lens adjustment mechanism comprises a lens (100) and a lens barrel (200). The movable lens adjustment mechanism is characterized in that the lens barrel (200) is divided into an inner ring (210), flexible hinge mechanisms (220) and an outer ring (230); the lens (100) is fixed to the inner ring (210); and the inner ring (210) is connected with the outer ring (230) through the three uniformly-distributed flexible hinge mechanisms (220). Compared with the prior art, and according to the movable lens adjustment mechanism of the invention, a symmetrical parallelogram hinge mechanism is adopted, so that radial slip between the driving point of a motor and rod pieces during a rod piece driving process can be avoided, and a high-precision adjustment requirement of a movable lens can be satisfied.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a movable mirror adjustment mechanism. Background technique [0002] In the lithography projection objective lens, due to the manufacturing and assembly errors of the lens, the imaging quality of the objective lens deteriorates. In order to solve this problem, movable lenses are generally used to compensate for the manufacturing and assembly errors of the lenses. [0003] In Chinese patent CN102707404A, the movable lens is supported by three evenly distributed flexible hinges, and the X / Y / Rz direction movement of the movable lens is realized through the combined movement of the three flexible hinges. Since the motor drives the rod to rotate, during the rotation of the rod, there will be radial slippage between the motor driving point and the rod, so the flexible mechanism will move in series during the movement, resulting in low adjustment accuracy , no...

Claims

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Application Information

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IPC IPC(8): G02B7/02G03F7/20
Inventor 彭云平王洪尊马很很
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD