A three-degree-of-freedom positioning platform with variable stiffness

Abstract

The invention discloses a three-degree-of-freedom positioning platform with the variable rigidity. The positioning platform comprises a base and a moving platform formed in the base; the moving platform is connected with the base through three rhombic flexible hinges evenly distributed in the circumferential direction; the moving platform comprises three input connecting rods evenly distributed in the circumferential direction; a double-wing type low-rigidity flexible mechanism arranged symmetrically is formed at the input end of each input connecting rod; the outer sides of the low-rigidity flexible mechanisms are connected with the base; each of two sides of the middle of each input connecting rod is provided with a bulge block; a high-rigidity flexible mechanism corresponding to each two bulge blocks is formed on the base and comprises two parts symmetrically arranged on two sides of the input connecting rod, a groove is formed in one side, close to the input connecting rod, of each part, and the two bulge blocks extend into the two grooves in a one-to-one correspondence manner; and gaps are formed between the inner side walls of the grooves and the side surfaces of the bulge blocks. The positioning platform is large in travel, high in precision, simple and compact in structure and low in cost.

Description

technical field [0001] The invention relates to micro-nano positioning technology, in particular to a three-degree-of-freedom positioning platform with variable stiffness. Background technique [0002] With the further development of micro-nano technology, its position is becoming more and more prominent in precision machining measurement, medical machinery, aerospace material processing, and nanotechnology. Micro-positioning technology is indispensable among them. , Microelectronic system manufacturing and other fields. High precision, large travel, and high bandwidth are the evaluation indicators for micro-positioning platforms. However, in the existing technology, it is often difficult to balance both high precision and large travel. Generally speaking, micro-positioning systems that can achieve nanometer-level precision travel It is only a dozen microns, and the precision of a micro-positioning system with a stroke of hundreds of microns is difficult to reach the nanome...

AI Technical Summary

Problems solved by technology

High precision, large travel, and high bandwidth are the evaluation indicators for micro-positioning platforms. However, in the existing technology, it is often difficult to balance both high precision and large travel. Generally speaking, micro-positioning systems that can achieve nanometer-level precision travel It is only a dozen microns, and the precision of a micro-positioning system with a stroke of hundreds of microns is difficult to reach the nanometer level

For systems with micro-feeding, such as nanoimprinting, micro-milling, nano-scribing, scanning probe systems, etc., the tool or probe of the system usually goes through a large stroke of rapid feed and then a small stroke with high precision and accuracy. Only in order to be in contact with the workpiece or sample, in order to achieve this purpose, developers usually use a large-stroke low-precision translation stage combined with a small-stroke high-precision translation stage, which makes the overall mechanism complex and bulky, increasing the cost

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