Stepping type micro piezoelectric motor and working method thereof

Abstract

The invention discloses a stepping type micro piezoelectric motor and a working method of the stepping type micro piezoelectric motor. The motor comprises a stator, a rotor and a base, wherein the rotor is connected onto the base through a guide rail; the stator is arranged on the base; the stator comprises a drive foot and an elastic pre-tightening mechanism; under the pre-tightening force of the elastic pre-tightening mechanism, the drive foot on the stator and the rotor keep close contact all the time in the whole motor working period; the drive foot comprises a group of piezoelectric laminates arranged parallel to the guide rail of the rotor and a group of piezoelectric laminates arranged vertical to the guide rail of the rotor, small-range vibration parallel to the direction of the guide rail and small-range vibration vertical to the direction of the guide rail are provided for the drive foot of the stator respectively, and the drive foot has an asymmetrical displacement output characteristic in the direction parallel to the guide rail in one period of motion. According to the stepping type micro piezoelectric motor disclosed by the invention, nano-scale and micron-scale displacement resolutions are easily realized respectively in a relatively wideband domain range, and meanwhile the motor has the advantages of low manufacturing cost, long service life and power failure self-locking.

Description

technical field [0001] The invention relates to a stepping micro piezoelectric motor, which belongs to the technical field of piezoelectric precision actuation. Background technique [0002] With the development of micro / nano technology, there is an urgent need for submicron and micro / nano precision actuators in the research of many engineering technology fields. However, because the traditional electromagnetic motor needs a deceleration device, it is difficult to break through in the development direction of miniaturization and high power-to-weight ratio. With the development of material science, new functional materials have proposed new solutions for these applications. Among them, the discovery of the inverse piezoelectric effect and the emergence of piezoelectric ceramic (PZT) materials with superior performance have made piezoelectric precision actuators The research has received extensive attention and has shown broad application prospects in the field of precision m...

AI Technical Summary

Problems solved by technology

The displacement output of the two piezoelectric stacks of the existing non-resonant friction-driven motor is coupled, and the displacement output characteristics of the motor stator drive foot in the direction perpendicular to the guide rail and parallel to the guide rail are often related to both piezoelectric stacks. Therefore, it is not easy to independently control the displacement output performance of the motor stator in two directions

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