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Piezoelectric-hydraulic mixed linear type stepping motor and working method thereof

A stepping motor, linear technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problems of small output force, limited friction, etc. Wide working frequency band, ensuring work stability, driving control signal and the effect of low machining accuracy

Active Publication Date: 2017-07-28
东台城东科技创业园管理有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The existing non-resonant friction drive principle type linear motor does not solve the problem of small output force well while ensuring a large stroke. At present, the output force of this type of motor is usually several Newtons
The existing piezoelectric laminated linear motor uses the displacement deformation of the piezoelectric laminate to provide the positive pressure between the motor stator and the mover. Since the output displacement of the piezoelectric laminate is generally several microns to tens of microns, it is transformed into a stator The normal pressure of the mover and the mover is generally tens of cattle, which limits the friction between the stator and the mover

Method used

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  • Piezoelectric-hydraulic mixed linear type stepping motor and working method thereof
  • Piezoelectric-hydraulic mixed linear type stepping motor and working method thereof
  • Piezoelectric-hydraulic mixed linear type stepping motor and working method thereof

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Effect test

Embodiment 1

[0049] Such as figure 1 The piezoelectric-hydraulic hybrid linear stepping motor structure shown includes mover 1, stator 2 and base 3; the mover is fixed on the side plate of the base by bolts; the stator 2 is fixed on the bottom plate of the base by bolts; The initial pressure between the stator 2 and the mover 1 can be controlled by controlling the front and rear positions of the stator 2 on the base.

[0050] Such as figure 2 As shown, the stator structure includes a driving foot 6, a support 5, a pre-compressed leaf spring, a vibrating hydraulic cylinder 8 and a fixed block 9.

[0051] Such as Figure 4 As shown, the pre-compressed leaf spring includes a ring frame structure, a flexible hinge and a square plate; the short side of the ring frame structure and the square plate are connected by a flexible hinge; the ring frame is provided with a round hole, which can be fixedly connected with the support 5; the square plate has Through holes, the upper and lower ends of ...

Embodiment 2

[0066] The difference between Embodiment 2 and Embodiment 1 is that the second transverse piezoelectric stack 11 in Embodiment 1 is replaced by a pre-tension spring, and nothing else is changed.

[0067] The working principle of embodiment 2 is basically the same as that of embodiment 1, except that in structure, the transverse piezoelectric laminations of embodiment 1 are arranged symmetrically, and symmetrical excitation voltage is also used in the way of excitation voltage. Embodiment 2 is asymmetrical in structure and excitation mode, and the asymmetric excitation voltage mode of embodiment 2 can have multiple options, and the signal waveform is as follows Figure 10 ~ Figure 13 shown.

[0068] For the symmetrical structure and excitation voltage in Embodiment 1, the differential principle can only be realized by changing the positive pressure between the stator and the mover, that is, the vibration of the vibrating hydraulic cylinder; while the asymmetrical differential p...

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Abstract

The invention discloses a piezoelectric-hydraulic mixed linear type stepping motor and a working method thereof. The motor includes a stator, a rotor and a base. The stator includes a drive foot, a support, and an elastic preload mechanism. The drive foot comprises two symmetrically-arranged sets of piezoelectric laminated layers arranged parallel to a guide rail and vibrating hydraulic cylinders arranged perpendicular to the guide rail direction, providing the stator drive foot with slight vibration parallel to the guide rail direction and perpendicular to the guide rail direction, respectively. Symmetrical triangular periodical signals are used to excite the piezoelectric laminated layers parallel to the guide rail direction and symmetrical periodical signals are used to excite the vibrating hydraulic cylinders perpendicular to the guide rail direction, so that the frictional driving characteristics between the stator and the rotor of the motor at a driving stage and a returning stage are significantly different, and thus the moving distance of the rotor at the driving stage is greater than that of the returning stage. The positioning precision of the motor gradually changes from nanometer level to micron level. Hopefully, the motor can substitute macro-micro combined positioning platforms with complex structures.

Description

technical field [0001] The invention relates to a piezoelectric-hydraulic hybrid linear stepping motor, which belongs to the technical field of piezoelectric precision actuation. Background technique [0002] With the development of micro / nano technology, there is an urgent need for submicron and micro / nano precision actuators in the research of many engineering technology fields. However, because the traditional electromagnetic motor needs a deceleration device, it is difficult to break through in the development direction of miniaturization and high power-to-weight ratio. With the development of material science, new functional materials have proposed new solutions for these applications. Among them, the discovery of the inverse piezoelectric effect and the emergence of piezoelectric ceramic (PZT) materials with superior performance have made piezoelectric precision actuators The research has received extensive attention and has shown broad application prospects in the fi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02
CPCH02N2/021
Inventor 陈西府李明卢倩王正刚周海
Owner 东台城东科技创业园管理有限公司
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