A differential linear piezoelectric motor and its working method

Abstract

The invention discloses a differential linear piezoelectric motor and a working method thereof. A driving foot on a motor stator comprises two groups of symmetric piezoelectric stacking layers parallel with a guide rail, and one group of piezoelectric stacking layers vertical to the guide rail, so as to respectively provide slight vibration in parallel with and vertical to the guide rail direction for the stator driving foot. The differential linear piezoelectric motor has the advantages that by utilizing symmetric periodic signals to excite piezoelectric stacking layer parallel with the guide rail direction, and rectangular wave signals to excite the piezoelectric stacking layer vertical to the guide rail direction, the friction driving characteristic between the motor stator and a rotor has obvious difference between the driving phase and the return phase, so that the movement distance of the motor in the driving phase is greater than the movement distance in the return phase; because the motor has obvious different differential friction characteristic in the frequency range of 0 to 1KHz, when the driving frequency is changed from low frequency to high frequency, the positioning accuracy of the motor is gradually changed from nanometer level to micrometer level, and the macro-micro combined positioning platform with complicated structure may be replaced.

Description

technical field [0001] The invention relates to a differential linear piezoelectric motor, belonging to the technical field of piezoelectric actuators. Background technique [0002] With the development of micro / nano technology, there is an urgent need for submicron and micro / nano precision actuators in the research of many engineering technology fields. However, because the traditional electromagnetic motor needs a deceleration device, it is difficult to break through in the development direction of miniaturization and high power-to-weight ratio. With the development of material science, new functional materials have proposed new solutions for these applications. Among them, the discovery of the inverse piezoelectric effect and the emergence of piezoelectric ceramic (PZT) materials with superior performance have made piezoelectric precision actuators The research has received extensive attention and has shown broad application prospects in the field of precision motion. ...

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to address the defects in the prior art and provide a solution to the contradiction between travel and precision in the field of piezoelectric precision actuation, that is, the positioning accuracy of piezoelectric actuators with large travel (mm order) Low (on the order of μm); and piezoelectric actuators with nanometer precision (including on the order of 10nm) usually have a small stroke (on the order of 0.1mm)

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