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Bellows pump apparatus

一种波纹管、泵装置的技术，应用在泵、泵控制、泵测试等方向，能够解决泵破损、半导体制造工艺不良影响等问题，达到抑制冲击压力的效果

Active Publication Date: 2017-08-29
NIPPON PILLAR PACKING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If this impact pressure is generated, the vibration caused by the impact pressure will propagate to the pump, piping, or equipment, which may cause damage to the above pump, etc.
In addition, liquid boiling (water vapor, cavitation, etc.) occurs due to the increase of negative pressure during suction, which may have adverse effects on semiconductor manufacturing processes, etc.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0034]

[0035] figure 1 It is a schematic configuration diagram of the bellows pump device according to the first embodiment of the present invention. The bellows pump device BP of this embodiment is used, for example, when supplying a transfer fluid such as a chemical solution or a solvent in a constant amount in a semiconductor manufacturing device. This bellows pump device BP has: a bellows pump 1; an air supply device 2 such as an air compressor that supplies pressurized air (working fluid) to the bellows pump 1; a mechanical regulator 3 and two regulators, namely The first and second electro-pneumatic regulators 51, 52, which adjust the air pressure of the pressurized air; two switching valves, that is, the first and second switching valves 4, 5; and the control part 6, which controls the ripple The drive of the tube pump 1 is controlled.

[0036] figure 2 It is a sectional view of the bellows pump 1 according to this embodiment.

[0037] The bellows pump 1 of th...

no. 2 Embodiment approach

[0122] Figure 10 It is a schematic configuration diagram showing a modified example of the bellows pump device according to the second embodiment of the present invention. The bellows pump device of the present embodiment includes: a bellows pump 1; an air supply device 2 such as an air compressor for supplying pressurized air (working fluid) to the bellows pump 1; A mechanical regulator 3 and a single electro-pneumatic regulator 52 for adjustment; a single solenoid valve 5 ; and a control section 6 .

[0123] Figure 11 It is a sectional view of the bellows pump according to the second embodiment.

[0124] The bellows pump 1 of the present embodiment has a built-in accumulator type structure, and includes: a pump head 11; and a cylinder portion 28 attached to one side ( Figure 10 and the accumulator part 70, which is installed on the other side of the pump head 11 in the left-right direction ( Figure 10 left in ).

[0125] A suction passage 34 , a discharge passage 35...

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PUM

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Abstract

Provided is a bellows pump apparatus by which an impulsive pressure generated when being switched from suctioning to discharging an operating fluid can be easily suppressed even in a pre-installed bellows pump. The bellows pump apparatus suctions a fluid to be transferred, by supplying one air chamber (26) of two sealed air chambers (21, 26) with pressurized air to expand bellows (13, 14); and discharges the fluid to be transferred, by supplying the other air chamber (21) with pressurized air to contract the bellows (13, 14). This bellows pump apparatus is provided with: electro-pneumatic regulators (51, 52) for adjusting a first air pressure of the pressurized air supplied to the one air chamber (26) and a second air pressure of the pressurized air supplied to the other air chamber (21); and a control unit (6) for controlling the electro-pneumatic regulators (51, 52) such that the first air pressure becomes smaller than the second air pressure at least at the time when expansion is ended during expansion of the bellows (13, 14).

Description

technical field [0001] The invention relates to a bellows pump device. Background technique [0002] In semiconductor manufacturing, chemical industry, etc., as a bellows pump for transferring and supplying a transfer fluid such as a chemical solution or a solvent, for example, a bellows pump configured as described in Patent Document 1 is known. One of the two air chambers supplies pressurized air, thereby causing the bellows to expand and suck the transfer fluid, and the other air chamber is supplied with pressurized air, thereby causing the bellows to contract and suck the transfer fluid. discharge. [0003] In such a bellows pump, in order to increase the discharge flow rate of the transfer fluid, the air pressure of the pressurized air supplied to each air chamber is generally increased. However, if the air pressure is increased, there will be a large transient moment when the intake of the transfer fluid by the expansion of the bellows is switched to the discharge of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/08F04B43/10
CPCF04B11/00F04B43/0081F04B43/10F04B43/113F04B45/022F04B45/0336F04B49/065F04B2203/10F04B2205/13F04B43/08F04B11/0058F04B49/22
Inventor 中野笃永江庆士
Owner NIPPON PILLAR PACKING CO LTD