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Micromechanical system having a stop element

A technology of a micromechanical system and a stopper element, applied in the field of micromechanical systems, can solve problems such as limited functional capability, and achieve the effect of avoiding functional damage and preventing bonding

Inactive Publication Date: 2018-03-06
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In particular, the functional structure can be glued to other elements here, so that the functional capabilities of the system can be limited

Method used

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  • Micromechanical system having a stop element
  • Micromechanical system having a stop element
  • Micromechanical system having a stop element

Examples

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Embodiment Construction

[0022] figure 1 A micromechanical system 100 with a substrate 105 and functional elements 110 is shown. The micromechanical system 100 can include, for example, a sensor, in particular an acceleration sensor or a rotation rate sensor. To make it easier to refer to the relationship, in figure 1 A coordinate system with a first direction (X), a second direction (Y) and a third direction (Z) are respectively drawn in the following drawings. Here, the directions X and Y spread out in a plane, and the surface of the substrate 105 preferably extends in this plane. It should be noted, however, that all other combinations and orientations of the Cartesian coordinate system are possible as embodiments. The micromechanical system 100 can generally be manufactured by semiconductor technology devices and can include different semiconductor materials. The base 105 preferably serves as a fixed mounting frame and can include silicon, for example. Other elements of the system 100 can includ...

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Abstract

The invention discloses a micromechanical system having a stop element. The micromechanical system includes a substrate; a functional element that is mounted to as to allow movement in relation to thesubstrate; and an elastic stop element. The stop element has a first end that is attached to the substrate, and a second end that is configured to engage with the functional element when the functional element is deflected by a predefined amount from a neutral position. The stop element has an elastic configure in a first direction that coincides with a preferred direction of the functional element, and in a second direction that extends at a right angle to the first direction.

Description

Technical field [0001] The invention relates to a micromechanical system. The invention particularly relates to a stop element for a movable functional element of a micromechanical system. Background technique [0002] The micromechanical system includes a substrate and a functional element, and the functional element is movably supported relative to the substrate. The components of the micromechanical system (also called MEMS, microelectromechanical system, or microelectromechanical integration system) generally have a size in the range of 1 to 100 μm, and the micromechanical system has a size of about 20 μm to 1 mm in one dimension. Typical application areas for micromechanical systems include acceleration sensors, rotation rate sensors, pressure sensors, sound sensors, and micromechanical imitation of instruments, such as pumps or gear structures. It is possible to produce a nanotechnology system from a micromechanical system by further shrinking, and the context shown here ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00
CPCB81B3/0002B81B3/0051B81B3/001B81B2203/0172B81B2203/0376
Inventor J·米勒
Owner ROBERT BOSCH GMBH