Method for determining methyltrichlorosilane in dimethyl dichlorosilane
A technology of dimethyldichlorosilane and methyltrichlorosilane, which is applied in the field of production and detection of dimethyldichlorosilane, can solve the problems of downstream process inspection requirements, unsatisfactory sensitivity and accuracy, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0015] Chromatograph: American Aglient, 7890A
[0016] (1) Determination of correction factor.
[0017] Chromatographic conditions: column temperature: initial temperature 40 °C, keep 6 min, first order rate 10 °C / min, end temperature 200 °C, keep 10 min; vaporization temperature: 200 °C; detection temperature: 300 °C; carrier gas flow rate (high-purity nitrogen ): 1.5 ml / min; hydrogen flow rate: 30 ml / min; air flow rate: 350 ml / min; split ratio: 100:1; injection volume: 0.4μl; capillary column: trifluoropropyl-methylpolysiloxane Alkane, 30m * 0.53mm * 1μm.
[0018] Dimethyldichlorosilane, n-octane and methyltrichlorosilane used in this example are chromatographically pure reagents.
[0019] Weigh 15ml of dimethyldichlorosilane in a headspace bottle, the weight is 12.5956g, and the content of 100ul is 99.6% CH 3 SiCl 3 , with a weight of 0.0939g, prepared CH 3 SiCl 3 The concentration is 7370ug / g mother liquor.
[0020] Accurately 10ml dimethyldichlorosilane, 10ul conte...
Embodiment 2
[0042] CH in dimethyldichlorosilane 3 SiCl 3 Determination of
[0043] Accurately measure 10ml dimethyldichlorosilane sample and 10ul internal standard octane, mix well, inject 0.2ul sample into chromatogram, use internal standard method for C 2 h 5 HSiCl 2 Quantify.
[0044] Chromatographic conditions: Chromatographic conditions: column temperature: initial temperature 40°C, hold for 6 minutes, first-order rate 10°C / min, end temperature 200°C, hold for 10 minutes; vaporization temperature: 200°C; detection temperature: 300°C; carrier gas flow ( High-purity nitrogen): 1.5ml / min; hydrogen flow rate: 30 ml / min; air flow rate: 350 ml / min; split ratio: 100:1; injection volume 0.4μl; capillary column: trifluoropropyl-methyl poly Silicone capillary column 30m*0.53mm*1μm.
[0045] The measured CH 3 SiCl 3 , octane area and the average correction factor RFi=12.4 obtained in embodiment 1, substitute following formula to calculate CH 3 SiCl 3 Content Wi, ug / g:
[0046]
[...
Embodiment 3
[0055] CH in dimethyldichlorosilane 3 SiCl 3 Determination of
[0056] Chromatographic conditions: Chromatographic conditions: column temperature: initial temperature 40°C, hold for 6 min, first order rate 10°C / min, end temperature 200°C, hold for 10 min; vaporization temperature: 100°C; detection temperature: 200°C; carrier gas flow ( High-purity nitrogen): 0.5ml / min; hydrogen flow rate: 20 ml / min; air flow rate: 100 ml / min; split ratio: 100:1; injection volume 0.1μl; capillary column: trifluoropropyl-methyl poly The siloxane capillary column is 30m*0.53mm*1μm, and the internal standard is C5, and the rest are the same as in Example 1.
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com