Three-dimensional magnetic levitation accelerometer and manufacturing method thereof

Abstract

The invention discloses a three-dimensional magnetic levitation accelerometer and a manufacturing method thereof, including an operation circuit system and a six-degree-of-freedom magnetic levitation structure, the six-degree-of-freedom magnetic levitation structure includes a magnetic cavity fixedly connected with a measured carrier and a magnetic levitation body suspended in the magnetic cavity The magnetic cavity forms a hexahedral space and is movable relative to the magnetic levitation body. The polarity of the first permanent magnetic layer of the second permanent magnetic layer arranged on any one side of the magnetic levitation body is the same as that of the first permanent magnetic layer on one side of the magnetic levitation body, so that mutual repulsion is generated simultaneously on the six sides of the magnetic levitation body The magnetic force enables the magnetic levitation body to reach a six-sided magnetic balance state and suspend in the magnetic cavity. Using the above technical scheme, the three-dimensional magnetic levitation structure is cleverly designed to realize six-degree-of-freedom levitation and then three-dimensional acceleration detection. The change of the acceleration of the measured carrier causes the corresponding change of the magnetic force of the first permanent magnetic layer and the second permanent magnetic layer through the pressure of the structure. The electric induction layer changes the magnetic force into an electric signal, so that the relationship between the suspension and the acceleration input is simple and precise.

Description

technical field [0001] The invention relates to an acceleration sensor, which belongs to the field of instruments and meters, and more specifically relates to a magnetic levitation accelerometer for measuring three-dimensional acceleration of an object and a manufacturing method thereof. Background technique [0002] Traditional accelerometers usually use a spring vibrator to sense acceleration changes, but due to the physical contact between the vibrator and the spring, it will be affected by factors such as mechanical structure performance and friction and cannot fully reflect the real acceleration input. In order to overcome this technical problem, countries all over the world have spared no effort to carry out research on various suspension accelerometers. Because there is no physical contact, they can fully reflect real acceleration changes, which is beneficial to improve accuracy and reduce volume. Magnetic levitation is an important research on levitation acceleromete...

AI Technical Summary

Problems solved by technology

However, the magnetic field system is a very complex system, and it is difficult to accurately obtain the spatial position of the inspection magnet. At the same time, the path of the inspection magnet returning to the center is not unique, which makes the control algorithm of the coil current extremely complicated and difficult to repeat measurement.

Images