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Coating application method

A coating method and coating technology, which can be applied to coatings, devices for coating liquid on the surface, electrical components, etc., and can solve the problems of forming coating patterns and being unable to exert the performance of coating patterns

Inactive Publication Date: 2018-05-11
TORAY ENG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, when the inkjet method is used to form a coating pattern, it is difficult to form a coating pattern in a predetermined shape because the droplet wets and spreads after landing on the substrate W.
In particular, when the distance between the coating patterns is narrow, the coating patterns may be connected to each other, and the expected performance of the coating pattern may not be exhibited.

Method used

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Experimental program
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Embodiment Construction

[0027] Embodiments of the present invention will be described using the drawings.

[0028] figure 1 It is a schematic diagram of the coating apparatus which implements this invention.

[0029] The coating device 1 has a coating section 2, a coating stage 3, an alignment section 4, and a control section 5. The coating section 2 moves from the coating section 2 while moving above the substrate W on the coating stage 3. The nozzles inside the nozzle discharge the liquid droplets of the coating liquid, so that the coating operation on the base material W is performed. Then, the droplets landing on the base material W are connected to each other, and the coating pattern 51 is formed on the base material W. In addition, before the coating unit 2 ejects the liquid droplets onto the substrate W, the alignment unit 4 takes an image of the alignment mark on the substrate W, and the control unit 5 adjusts the position and angle of the coating stage 3 based on the result, so as to The...

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PUM

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Abstract

Provided is a coating application method whereby a coating application pattern can be formed in accordance with a shape set in advance. Specifically, the present invention is a coating application method comprising applying a coating liquid in an entire pattern region formed on a substrate and forming a coating application pattern having the shape of the pattern region 52, the periphery of the pattern region 52 having lower lyophilic properties than the pattern region 52, and liquid repellent parts 54 being provided inside the pattern region 52, the liquid repellent parts 54 having lower lyophilic properties than the remaining portion of the inside of the pattern region 52.

Description

technical field [0001] The present invention relates to a coating method for coating a coating liquid onto a substrate by an inkjet method to form a coating film of an arbitrary shape. Background technique [0002] When forming a coating pattern of an arbitrary shape on the substrate W, photolithography was conventionally used, but coating by an inkjet method is often used in recent years instead. In photolithography, multiple processes such as coating, exposure, and etching are required, and a large amount of coating material is consumed in the etching process. In contrast, the inkjet method can use fewer processes and almost no waste of coating material. Formation of the coating pattern 51 is performed using a cloth material. [0003] However, when the inkjet method is used to form a coating pattern, it is difficult to form a coating pattern in a predetermined shape because the droplet wets and spreads after landing on the substrate W. In particular, when the interval be...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05D1/26B05D3/06
CPCH10K71/236B05C5/027B05C11/1034B05D1/26B05D3/002B05D3/06B05D2350/30H10K99/00
Inventor 岛谷谦一友枝哲
Owner TORAY ENG CO LTD