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Large sized showerhead assembly

A shower head and large-area technology, applied in the direction of electrical components, electric solid devices, semiconductor devices, etc., can solve the problems of shower head 30 damage, damage, and inability to compensate for the volume change of shower head 30, etc., to achieve firm connection, Effect of allowable volume change

Active Publication Date: 2018-07-03
TES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At this time, if the shower head 30 is firmly connected to the backing plate 10 with bolts 20 etc. as in the prior art, the volume change of the shower head 30 caused by thermal expansion cannot be compensated, so when the thermal expansion occurs, the shower head will 30 broken or damaged

Method used

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  • Large sized showerhead assembly
  • Large sized showerhead assembly
  • Large sized showerhead assembly

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0037] Hereinafter, a large-area shower head assembly according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0038] figure 1 It is a perspective view showing a large-area shower head assembly 2000 according to an embodiment of the present invention.

[0039] refer to figure 1 , the large-area shower head assembly 2000 includes: a backing plate 2100 provided on the upper part of the chamber (not shown); and a shower head 2300 provided on the lower part of the backing plate 2100 toward the substrate (not shown). ) supply process gas; and the shower head 2300 is connected to the backing plate 2100 in a manner that enables thermal expansion.

[0040] Since the shower head 2300 increases in weight due to a larger area, it is important to connect to the backing plate 2100 without sagging. In addition, the shower head 2300 is heated to a high temperature during the deposition process, so it needs to be conne...

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PUM

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Abstract

The invention relates to a large sized showerhead assembly. The large sized showerhead assembly is characterized by comprising a backing plate disposed in the upper part of a chamber, and a showerhead, which is disposed on the lower part of the backing plate and supplies gas to a substrate, wherein the showerhead is connected to the backing plate to thermally expand. The provided large sized showerhead assembly has the advantages that when the large sized showerhead assembly is connected to the backing plate, the showerhead assembly will not droop and is firmly connected, and volume change caused by thermal expansion is tolerable.

Description

technical field [0001] The invention relates to a large-area shower head assembly used in a thin film deposition device. Background technique [0002] Recently, flat-panel displays have been widely used as monitors for televisions (Television, TV) or computers, including personal portable terminals. Plasma Display Panel, PDP) and Organic Light Emitting Diodes (Organic LightEmitting Diodes, OLED), etc. Among them, OLED, which is called an organic light-emitting diode, refers to a "self-luminous organic substance" that emits light by itself by utilizing an electroluminescence phenomenon that emits light when an electric current flows into a fluorescent organic compound. OLED can be driven at low voltage, can be made thinner, has a wide viewing angle and fast response speed, so it is favored as a next-generation display device that can replace the existing LCD. [0003] The manufacturing process of this kind of OLED generally includes a pattern forming process, an organic thi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H10K99/00
CPCH10K71/00H01J37/3244H01J37/32477H01J37/32091C23C16/45565H01L21/205H01L21/0228H10K71/10H01J2237/3323C23C16/5096H01J2237/3321H01J2237/3325
Inventor 金宰焕
Owner TES CO LTD