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UHV device interconnected in-situ reaction cell and built-in mass spectrometer electric quadrupole combined structure

A technology of in-situ reaction and equipment interconnection, applied in the direction of circuits, discharge tubes, sampling devices, etc., to achieve the effect of minimizing time delay

Active Publication Date: 2018-11-06
SHANGHAI TECH UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0008] right figure 1 The main technical problem in the modification of the layout shown is that the connection method of the built-in mass spectrometer electric quadrupole in the ultra-high vacuum equipment is only suitable for detecting possible micro-leakage in the ultra-high vacuum equipment or for the treatment of trace gases at the atomic level of the sample , which corresponds to an air pressure of 10 -10 ~10 -5 Within the range of mbar; while the in-situ pool online detection needs to be connected to the environmental parameters that need to reach 1-10bar

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  • UHV device interconnected in-situ reaction cell and built-in mass spectrometer electric quadrupole combined structure
  • UHV device interconnected in-situ reaction cell and built-in mass spectrometer electric quadrupole combined structure
  • UHV device interconnected in-situ reaction cell and built-in mass spectrometer electric quadrupole combined structure

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Embodiment Construction

[0053] In order to make the present invention more comprehensible, preferred embodiments are described in detail below with accompanying drawings.

[0054] Such as figure 2 As shown, the combined structure of a UHV equipment interconnected in-situ reaction cell and a built-in mass spectrometer electric quadrupole provided by the present invention, according to the previous patent scheme, needs to complete the mass spectrometer electric quadrupole 7 pairs of in-situ reaction cell arrays. Gas line 9 sampling. In order to use the original configuration hardware of the ultra-high vacuum characterization equipment to achieve this assembly scheme, it is first necessary to change the original two vacuum flanges of the ultra-high vacuum characterization equipment into flange interfaces, which is required for real-time sampling in the previous patent scheme two vacuum ports. The first flange modification: change the straight-through flange 10 connecting the mass spectrometer quadrup...

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Abstract

The invention relates to a UHV device interconnected in-situ reaction cell and built-in mass spectrometer electric quadrupole combined structure, which is characterized in that one end of a stainlesssteel capillary pipeline is connected to the gas discharge pipeline of an in-situ reaction cell, the other end is a sampling port, sampling gas is divided into two parts after the sampling gas flows out of the sampling port, one part enters a vacuum transfer chamber through a low flow rate control ratio valve, and the other part enters a mass spectrometer electric quadrupole through a high flow rate control ratio valve. According to the present invention, the sampling time delay can be neglected when the mass spectrometer electric quadrupole performs the gas sampling component analysis on theinterconnected in-situ reaction cell, such that sampling analysis requirements of in-situ continuous analysis, real-time analysis and high time resolution are achieved.

Description

technical field [0001] The present invention relates to the reaction control, kinetic characterization, component detection and the joint characterization with ultra-high vacuum characterization equipment (abbreviated as UHV) for online preparation of basic chemical reaction kinetics research, especially focusing on: having more than one vacuum molecular The ultra-high vacuum characterization equipment of the pump, coupled with the in-situ cell sample preparation process, realizes its online component analysis and characterization through the built-in mass spectrometer quadrupole extension function of the ultra-high vacuum characterization equipment. In terms of application, the present invention satisfies the requirements of synchronous, real-time and continuous recording of the reaction gas components in the environment in industrial preparation, so as to provide detailed information of the preparation process for accurate observation of the spectrum or microstructure imaging...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/62B01J3/04
CPCB01J3/04G01N27/62B01J3/006B01J19/0073H01J49/0422H01J49/4215G01N1/22H01J49/24G01N1/2247G01N30/7206
Inventor 杨永
Owner SHANGHAI TECH UNIV
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