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Diaphragm valve with full closure

A film and valve cavity technology, applied in the field of fluid systems, can solve the problems of increasing the starting time, promoting particle generation, aggravation, etc., and achieve the effect of reducing the starting time

Active Publication Date: 2018-11-23
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Air bubbles or gels can cause several problems to occur including increased priming time for pumps incorporating such valves, promoting particle generation, fluid not being dispensed from fluid systems incorporating these valves, difficulty cleaning fluid systems incorporating such valves , poor fluid handling characteristics of the fluid system, or other detrimental effects
The problems unique to these types of valves are further exacerbated by the high viscosity fluids used in some semiconductor processes

Method used

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  • Diaphragm valve with full closure
  • Diaphragm valve with full closure
  • Diaphragm valve with full closure

Examples

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Embodiment Construction

[0024] The invention and its various features and advantageous details are more fully explained with reference to the non-limiting examples illustrated in the drawings and described in detail and in the following description. Descriptions of well-known starting materials, processing techniques, components, and equipment are omitted so as not to unnecessarily obscure the details of the invention. It should be understood, however, that the detailed description and specific examples, while indicating some embodiments of the invention, are given by way of illustration only and not limitation. Various substitutions, modifications, additions and / or rearrangements within the spirit and / or scope of the basic inventive concept will be apparent to those skilled in the art from the present invention.

[0025] Specific membrane values ​​may utilize a membrane captured or otherwise retained around the outer edge in the valve cavity, where hydraulic or pneumatic pressure (actuation fluid) i...

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PUM

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Abstract

A fluid valve (700) is disclosed that incorporates a plunger (760) with a fluid channel (766). The plunger is connected to a (724) boss coupled to a diaphragm 720), this boss also includes a fluid channel (726) and the plunger and boss fluid channels are in fluid communication. The boss fluid channel opens to the backside of the diaphragm in the valve cavity (780) and permits substantially complete pressurization or evacuation of the volume behind the diaphragm in the valve. The substantially complete pressurization of the volume behind the diaphragm enables full closure of the diaphragm and improves contact of the diaphragm with the valve seat (712), thereby improving performance of the valve.

Description

[0001] Related applications [0002] Priority is hereby claimed under 35 U.S.C. §119 to U.S. Provisional Patent Application No. 62 / 317,299, filed April 1, 2016. The entire disclosure of US Provisional Patent Application No. 62 / 317,299 is hereby incorporated by reference for all purposes. technical field [0003] The present invention generally relates to fluid systems. More particularly, the present invention relates to valves for fluid systems. More specifically, the present invention relates to membrane valves and high precision membrane valves capable of full closure. Background technique [0004] Many applications require precise control of the amount or rate of fluid dispensed or moved by a fluid system. For example, in semiconductor processing, controlling the amount and rate at which photochemicals, such as photoresist chemicals, are applied to semiconductor wafers is critical. Coatings applied to semiconductor wafers during processing typically require a flatnes...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K7/17F16K31/122F16K31/126
CPCF16K7/17F16K31/122F16K31/126F16K47/00
Inventor I·盖许盖伊B·加伯G·葛诺拉
Owner ENTEGRIS INC