Laser triangulation lens center thickness measuring device and its measuring method

Abstract

The invention relates to a lens central thickness measuring device using laser triangulation and a measuring method thereof. The measuring device comprises a laser source, a beam splitting prism, a lens installing and adjusting mechanism, a reticle, a video monitor, a first CCD imaging system and a second CCD imaging system. The lens installing and adjusting mechanism is provided with a lens to bemeasured. The lens to be measured, the beam splitting prism, the reticle, and the video monitor are vertically disposed successively along an optical axis. The laser source is disposed on a side of the beam splitting prism. The first CCD imaging system and the second CCD imaging system are symmetrically disposed obliquely above and obliquely below the lens to be measured respectively. The lens installing and adjusting mechanism includes a tilt adjustment portion and a rotation measuring portion. The method of the invention solves the problem in the prior art that the lens to be measured is large in tilt off-axis error and low in positioning aiming precision, and is uneasy to measure in real time, and achieves the high-precision, noncontact, low-cost real-time measurement of the lens central thickness.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and in particular relates to a laser triangulation lens center thickness measurement device and a measurement method thereof. Background technique [0002] Optical lenses are generally made of optical glass or polymer materials, and excellent optical lenses have strict tolerance limits. In the field of optics, the refractive index, surface radius of curvature and central thickness are the three basic parameters of the lens, among which the central thickness of the lens will have a greater impact on the imaging quality of the optical system, directly affecting the focal length of the lens, imaging quality and other parameters, Therefore, real-time monitoring must be carried out during the production process. For example, in high-performance optical systems such as lithography machine objective lenses and aerospace cameras, there are strict tolerance restrictions on lenses, a...

AI Technical Summary

Problems solved by technology

[0004] The invention provides a lens center thickness measurement method based on laser triangulation to solve the problems existing in the prior art, such as large tilt and off-axis errors of the lens to be measured, low positioning and aiming accuracy, and difficult real-time measurement, etc., and realizes the measurement of the lens center thickness. High-precision, non-contact, low-cost real-time measurement

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