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Manufacturing method of display substrate, display substrate, and display device

A manufacturing method and display substrate technology, applied in the field of display devices and display substrates, capable of solving problems such as poor short circuit between pixel electrodes and gates

Active Publication Date: 2021-08-17
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The present invention at least partly solves the problem that there is no effective means to detect the short circuit between the pixel electrode and the grid in the manufacturing process of the existing ADS mode display substrate, and provides a method for manufacturing the display substrate, a display substrate and a display substrate. device

Method used

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  • Manufacturing method of display substrate, display substrate, and display device
  • Manufacturing method of display substrate, display substrate, and display device
  • Manufacturing method of display substrate, display substrate, and display device

Examples

Experimental program
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Embodiment 1

[0046] This embodiment provides a method for manufacturing a display substrate. The display substrate includes a plurality of sub-pixels distributed in an array, and each sub-pixel includes a transistor, a pixel electrode, and a common electrode. The manufacturing method includes:

[0047] forming a pixel electrode on the substrate by a patterning process, and forming a gate of the transistor and a gate line connected to the gate on the substrate by a patterning process;

[0048] forming a passivation layer, making test vias on the passivation layer, and connecting the test vias to the pixel electrodes;

[0049] A common electrode material layer is formed, and the common electrode material layer is connected to the pixel electrode at the test via hole;

[0050] Carry out an open circuit-short circuit test on the common electrode material layer and the gate line. If the common electrode material layer is short-circuited with any gate line, it is determined that the gate of at l...

Embodiment 2

[0053] This embodiment provides a method for manufacturing a display substrate, which includes a plurality of sub-pixels distributed in an array, and each sub-pixel includes a transistor, a pixel electrode 12 and a common electrode 13a. figure 1 The pixel electrode 12, the common electrode 13a and the gate 111 of the transistor in the pixel circuit are shown in . Other structures of the transistor can be arranged according to conventional design, so in figure 1 not shown in . Gates 111 of transistors of a plurality of pixel circuits are connected to one gate line 16 .

[0054] The following is the complete scheme of the manufacturing method.

[0055] Step 1: Form the pixel electrode 12 on the substrate 10 by patterning, and form the gate 111 of the transistor and the gate line 16 connected to the gate 111 on the substrate 10 by patterning.

[0056]The sequence of forming the pixel electrode 12 and the gate electrode 111 is not required. FIG. 2( a ) shows the shape of the p...

Embodiment 3

[0082] This embodiment provides a display substrate, which is obtained through the manufacturing method provided in Embodiment 1 or Embodiment 2 of the present invention.

[0083] It can be understood that in part of the display substrate produced by this manufacturing method, there is a test via hole connecting the layer where the common electrode is located and the pixel electrode (the test via hole can also be a pixel electrode via hole at the same time); in this test via hole There may be no conductive material, or part of the conductive material may be reserved (if the test via hole is a pixel electrode via hole, there must be a conductive material in it for the connection between the drain electrode and the pixel electrode, but no matter what form, the test via hole remains conductive material should be disconnected from the common electrode).

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Abstract

The invention provides a method for manufacturing a display substrate, a display substrate and a display device, belonging to the field of display technology, which can at least partly solve the problem of the short circuit between the pixel electrode and the gate in the display substrate of the existing ADS display mode, which is difficult to detect during the manufacturing process. out of the question. The manufacturing method of the present invention includes: forming a pixel electrode on a substrate by a patterning process, and forming a gate of a transistor and a gate line connected to the gate on a substrate by a patterning process; forming a passivation layer, and making a test electrode on the passivation layer Vias, the test vias are connected to the pixel electrodes; the common electrode material layer is formed, and the common electrode material layer is connected to the pixel electrodes at the test via holes; the open-short circuit test is performed on the common electrode material layer and the gate line, if the common electrode material layer If it is short-circuited with any gate line, it is determined that the gate of at least one transistor connected to the gate line is short-circuited with the corresponding pixel electrode.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a method for manufacturing a display substrate, a display substrate and a display device. Background technique [0002] The manufacturing process of the display substrate used for the liquid crystal display of the existing ADS mode is as follows: firstly, the pixel electrode (generally adopting indium tin oxide (ITO) material) and the gate (including the gate line) of the transistor are made on the surface of the substrate, and the pixel electrode and There is no insulating layer between the gates; [0003] The rest of the structure of the transistor (e.g. gate insulating layer, active region, source, [0004] Drains) and lines connected to them, etc.; then make a common electrode (generally using indium tin oxide (ITO) material), until the entire display substrate is completed. Wherein, a pixel electrode, a transistor and a common electrode participate in forming ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/13G02F1/1362H01L27/12
CPCG02F1/1303G02F1/1362H01L27/1214
Inventor 王骁马禹闫岩
Owner BOE TECH GRP CO LTD