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A kind of iron-doped amorphous carbon thin film and preparation method thereof

An amorphous carbon and iron doping technology, applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of complex equipment system, high cost, unstable film performance, etc., and achieve deposition efficiency High and simple preparation method

Active Publication Date: 2020-04-28
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Common thin film preparation techniques include vacuum evaporation, sputtering, laser pulse deposition, molecular beam epitaxy, metal-organic chemical vapor deposition, hot wire chemical vapor deposition, and plasma-enhanced chemical vapor deposition, etc., magnetron sputtering or plasma Bulk vapor deposition and other film-making technologies, the equipment system is complex, difficult to operate, film performance is unstable, and the cost is high

Method used

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  • A kind of iron-doped amorphous carbon thin film and preparation method thereof
  • A kind of iron-doped amorphous carbon thin film and preparation method thereof
  • A kind of iron-doped amorphous carbon thin film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Using a laboratory vacuum evaporation machine, the base material is high-purity iron (99.99%), the size is 10mm×10mm×3mm, mirror polished, ultrasonically cleaned in absolute ethanol and acetone for 20 minutes before use, and then dried with argon Finally, paste it on the sample holder in the vacuum chamber, and the sample holder rotates during the evaporation process to maintain the uniformity of the film, and the rotation speed is 15rpm; the evaporation source is a high-purity carbon wire (99.99%), and the two ends are connected to the fixture and the electrode; before evaporation , adjust the distance between the target and the base, that is, adjust the distance between the base material and the evaporation source to be 50 mm, and protect the base with the evaporation source baffle, and evacuate until the vacuum degree is greater than 5×10 -3 Pa, remove the baffle; during evaporation, flow argon gas, the flow rate is 0.5mL / min, and the carbon wire is preheated for 30s;...

Embodiment 2

[0031] Using a laboratory vacuum evaporation machine, the base material is high-purity iron (99.99%), the size is 10mm×10mm×3mm, mirror polished, ultrasonically cleaned in absolute ethanol and acetone for 15 minutes before use, and then dried with argon Finally, paste it on the sample holder in the vacuum chamber, and the sample holder rotates during the evaporation process to maintain the uniformity of the film, and the rotation speed is 15rpm; the evaporation source is a high-purity carbon wire (99.99%), and the two ends are connected to the fixture and the electrode; before evaporation , adjust the distance between the target and the base, that is, adjust the distance between the base material and the evaporation source to be 55mm, and protect the base with the evaporation source baffle, and evacuate until the vacuum degree is greater than 5×10 -3 Pa, remove the baffle; during evaporation, flow argon gas, the flow rate is 0.5mL / min, and the carbon wire is preheated for 30s; ...

Embodiment 3

[0036] Using a laboratory vacuum evaporation machine, the base material is high-purity iron (99.99%), the size is 10mm×10mm×3mm, and the mirror surface is polished. Before use, it is ultrasonically cleaned in absolute ethanol and acetone for 30 minutes, and then dried with argon. Finally, paste it on the sample holder in the vacuum chamber. The sample holder rotates during the evaporation process to maintain the uniformity of the film, and the rotation speed is 13rpm; the evaporation source is a high-purity carbon wire (99.99%), and the two ends are connected to the fixture and the electrode; before evaporation , adjust the target base distance, that is, adjust the distance between the base material and the evaporation source to be 60mm, and use the evaporation source baffle to protect the base, and evacuate until the vacuum degree is greater than 5×10 -3 Pa, remove the baffle; during evaporation, flow argon gas, the flow rate is 0.1mL / min, and the carbon wire is preheated for ...

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Abstract

The invention relates to an iron-doped amorphous carbon thin film and a preparation method thereof. The preparation method comprises the following steps that (1), pre-processing is carried out, specially an iron sheet is as a substrate material to perform grinding and polishing treatment, after cleaning and bowing dried treatment, the iron sheet is pasted on a sample frame of a vacuum chamber, anda carbon wire is as an evaporation source and is connected to an electrode; (2) pre-plating preparation is carried out, a vacuum chamber is vacuumized, and the target base distance is adjusted; and (3) evaporation is carried out, under the condition of inert gas, an evaporation current is adjusted to perform evaporation, a layer of carbon thin film is deposited on the surface of the iron sheet, and the iron-doped amorphous carbon thin film is prepared. Compared with the prior art, the iron-doped amorphous carbon thin film prepared by the vacuum evaporation method is mainly composed of graphitized carbon sp2 and diamond carbon sp3, the distance to the iron substrate is closer, the graphitization degree is higher, and the preparation method is simple, the film forming speed is high, and theefficiency is high.

Description

technical field [0001] The invention relates to a carbon film, in particular to an iron-doped amorphous carbon film and a preparation method thereof. Background technique [0002] Amorphous carbon film is a kind of metastable long-range disordered amorphous material containing sp3 and sp2 bonds, which has the excellent characteristics of diamond and graphite, high hardness and high elastic modulus, low friction coefficient, excellent Wear resistance, good chemical inertness and biocompatibility, etc., have broad application prospects in the fields of machinery, electronics, optics, biomedicine, aerospace and other fields. [0003] In recent years, different elements or nanoparticles such as Au, N, Ni, and ZnO have been doped into amorphous carbon films to prepare functional carbon-based composite films with good electrical, optical, magnetic, and photocatalytic properties, which has attracted research. The interests of researchers, especially iron-doped amorphous carbon thi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/26C23C14/06
CPCC23C14/0605C23C14/26
Inventor 严彪周春霞严鹏飞
Owner TONGJI UNIV