Plasma generator and plasma washing device
A plasma and cleaning device technology, which is applied to the cleaning methods, cleaning methods and utensils, chemical instruments and methods using gas flow, etc., can solve the problems of uneven plasma injection, cleaning dead corners, and uneven cleaning effects. Optimum cleaning uniformity
Inactive Publication Date: 2019-02-22
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology
[0006] However, in figure 2 In the shown plasma cleaning device 3, since the plasma is generated in the plasma generating cylinder 31 and then ejected through the nozzle 311, there is a phenomenon of uneven plasma ejection, resulting in uneven cleaning effect
In addition, when facing a curved surface to be cleaned, the plasma cleaning device 3 also has the problem of cleaning dead angles
Method used
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[0027] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0028] In the present invention, unless otherwise clearly specified and limited, a first feature being "on" or "under" a second feature may include direct contact between the first and second features, and may also include the first and second features Not in direct contact but through another characteristic contact between them. Moreover, "above", "above" and "above" the first feature on the second feature include that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is h...
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The invention provides a plasma generator and a plasma washing device using the plasma generator. The plasma generator and the plasma washing device are used for treating a surface to be treated. Theplasma generator comprises at least one plasma spraying tube component, wherein the plasma spraying tube component comprises a plurality of plasma spraying tubes and a common flowing channel; each plasma spraying tube is provided with a gas inlet end and a gas outlet end and is in fluid connection with the common flowing channel through the gas inlet end; the plasma spraying tubes are uniformly arranged on the common flowing channel; the outlet end surface of each plasma spraying tube faces towards the surface to be treated; distances between the outlet ends of the plasma spraying tubes and the surface to be treated are equal.
Description
technical field [0001] The invention relates to the technical field of display panels, in particular to a plasma generator and a plasma cleaning device for cleaning a substrate or a cover plate of a display panel. Background technique [0002] Plasma has the characteristics of low macroscopic temperature and high electron temperature. It is rich in highly active excited state ions and high-energy charged particles, so it is suitable for modifying the surface of materials and cleaning the surface of glass and other objects. [0003] figure 1 Shown is a conventional plasma generating device 1 in the prior art. Such as figure 1 As shown, the isostereo self-generating device 1 includes: a gas source 11 , a high-voltage radio frequency generator 12 and a spray head 13 . The spray head 13 has an inner cavity 131, and the inner cavity 131 is an insulator. The gas in the gas source 11 passes through a gas path 111 to form a gas flow 112 in the inner chamber 131 of the shower hea...
Claims
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IPC IPC(8): B08B7/00B08B5/04
CPCB08B5/04B08B7/0035
Inventor 王永青
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD