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Substrate inverting device, substrate processing apparatus, and substrate catch-and-hold device

A technology for reversing devices, substrates, used in transportation and packaging, electrical components, conveyor objects, etc.

Active Publication Date: 2019-04-02
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, if the same inversion path is used to invert the substrate regardless of the state of the substrate (for example, unprocessed or processed), dirt, dust, etc. Possibility on processed substrates

Method used

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  • Substrate inverting device, substrate processing apparatus, and substrate catch-and-hold device
  • Substrate inverting device, substrate processing apparatus, and substrate catch-and-hold device
  • Substrate inverting device, substrate processing apparatus, and substrate catch-and-hold device

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Embodiment Construction

[0038] figure 1 It is a plan view of the substrate processing apparatus 1 which concerns on one Embodiment of this invention. figure 2 From figure 1 II-II line observation diagram of the substrate processing apparatus 1 . image 3 From figure 1The diagram of the substrate processing apparatus 1 observed on the line III-III. In addition, an XYZ rectangular coordinate system in which the Z-axis direction is the vertical direction (that is, the vertical direction) and the XY plane is the horizontal plane is appropriately added to each of the drawings referred to below.

[0039] The substrate processing apparatus 1 is an apparatus that continuously processes a plurality of semiconductor substrates 9 (hereinafter, simply referred to as "substrates 9"). In the substrate processing apparatus 1 , for example, cleaning processing of the substrate 9 is performed. The substrate processing apparatus 1 includes an index module 10 and a cleaning processing module 20 . In the followin...

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Abstract

The invention provides a substrate inverting device, a substrate processing apparatus, and a substrate catch-and-hold device. In the substrate inverting device, each lower guide has a downward inclined plane that comes in contact with a peripheral edge portion of a substrate held in a horizontal position to support the substrate from below. Each upper guide has an upward inclined plane that comesin contact with the peripheral edge portion of the substrate to catch and hold the substrate between the lower guides and the upper guides. Each lower guide includes first and second lower contact regions that are switched by a switching mechanism and selectively serve as the downward inclined plane. Each upper guide includes first and second upper contact regions that are switched by the switching mechanism and selectively serve as the upward inclined plane. This allows the regions of contact between the upper and lower guides and the substrate in accordance with the state of the substrate.

Description

technical field [0001] The invention relates to a substrate reversing device, a substrate processing device and a substrate clamping device. Background technique [0002] Conventionally, in the manufacturing process of a semiconductor substrate (hereinafter, simply referred to as a "substrate"), various processes are performed on the substrate. For example, in the substrate processing apparatus of JP-A-2013-46022 (Patent Document 1), the surface and the back surface of the substrate are processed. In this substrate processing apparatus, a substrate with its surface facing upward is carried from a carrier into an inversion path, and after being inverted in the inversion path, the substrate is conveyed to a processing unit. The substrate processed on the backside in the processing unit is carried into the inversion path again, reversed, and then transferred to the tray. [0003] The inversion path is equipped with chucks that hold the substrate in a horizontal posture. The ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/683
CPCH01L21/67742H01L21/67766H01L21/683H01L21/67051H01L21/67178H01L21/67778H01L21/68707H01L21/68764H01L21/67046H01L21/67796H01L21/67787H01L21/67028H01L21/67092
Inventor 村元僚
Owner DAINIPPON SCREEN MTG CO LTD
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