Resonant strain sensor with high-precision compensation

Abstract

The invention provides a resonant strain sensor with high-precision compensation. The resonant strain sensor comprises a sensor part and a compensation circuit part, the sensor part comprises a pressure sensing membrane, a non-pressure-sensitive area, a resonant working beam, a first resonant compensation beam and a second resonant compensation beam. The pressure sensing diaphragm is positioned inthe center of the whole sensor part; the non-pressure-sensing area is located on the periphery of the pressure-sensing diaphragm, the periphery of the pressure-sensing diaphragm is fixedly supportedon the inner wall of the non-pressure-sensing area, the two ends of the resonant working beam are fixedly supported at the center of the upper surface of the pressure-sensing diaphragm, and the firstresonant compensation beam and the second resonant compensation beam are symmetrically and fixedly supported on the two sides of the resonant working beam. According to the method, errors are greatlyreduced, and the accuracy is improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a high-precision compensation resonant strain sensor. Background technique [0002] The resonant strain sensor mainly converts the change of the applied pressure into the change of the corresponding resonance frequency, and then obtains the strain force through the relationship between the frequency and the pressure. Whether the resonance frequency is electrostatic excitation, electromagnetic excitation, or other excitation methods, it is inevitable because Changes in environmental factors such as temperature cause changes in the resonant frequency of sensitive components, resulting in measurement errors. At present, some strain sensors are only equipped with temperature compensation, but temperature compensation can intelligently eliminate the measurement caused by temperature changes. The patent publication number is CN101281071B In the paper, the structure of double resonant b...

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Problems solved by technology

[0002] The resonant strain sensor mainly converts the change of the applied pressure into the change of the corresponding resonance frequency, and then obtains the strain force through the relationship between the frequency and the pressure. Whether the resonance frequency is electrostatic excitation, electromagnetic excitation, or other excitation methods, it is inevitable because Changes in environmental factors such as temperature cause changes in the resonant frequency of sensitive components, resulting in measurement errors. At present, some strain sensors are only equipped with temperature compensation, but temperature compensation can intelligently eliminate the measurement caused by temperature changes. The patent publication number is CN101281071B In the paper, the structure of double resonant beams is proposed to eliminate the measurement error caused by other environmental factors. However, the problem in this technical solution is that it is necessary to ensure that the various relevant parameters of the compensation beam and the working beam are completely consistent in order to achieve the best performance. The compensation effect, but it is impossible to guarantee the consistency completely in the actual situation, there will still be errors, and the accuracy cannot be guaranteed

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