A high-resolution phase detection method based on planar grating laser interferometer
A technology of laser interferometer and planar grating, which is applied in the direction of instruments, measuring devices, optical devices, etc., can solve the problems of unsatisfactory small-scale measurement and low measurement accuracy, and achieve the effect of solving low measurement accuracy and wide application prospects
Active Publication Date: 2020-08-18
TSINGHUA UNIV
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[0003] As mentioned above, a high-resolution phase detection method based on planar grating laser interferometer is proposed. This method uses the dual-frequency interferometer phase detection method to realize displacement measurement, so as to solve the measurement accuracy in the traditional phase detection technology based on time measurement. Low, can not meet the small range measurement and other issues
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[0049] The high-resolution phase detection method based on the planar grating laser interferometer of the present invention will be described below with reference to the accompanying drawings and examples.
[0050] 1) In a dual-frequency planar grating laser interferometer system, such as figure 1 As shown, the laser emits a beam through the collimator, and after passing through the 1 / 4 wave plate, the laser beam is divided into two beams through the beam splitter, one of which outputs the first output signal through the first interferometer, and the other beam through the polarization splitter The mirror continues to be divided into two beams, the two beams are respectively reflected by the grating installed on the fixed stage and the moving stage to generate interference, and the second output signal is output through the second interferometer; the first interferometer outputs a standard sinusoidal signal as A reference signal, the second interferometer outputs a sinusoidal ...
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The invention is a high-resolution phase detection method based on a plane grating laser interferometer. The method uses a dual-frequency interferometer phase detection method to realize displacement measurement, and the processing of the measurement signal includes an integer part and a fractional part. In this invention, the phase equations of the displacement measurement signal are constructed according to the principle of the optical path of the heterodyne planar grating laser interferometer, and the nonlinear equations whose unknowns are instant phase, interval phase and signal amplitude are established, and the least square method is used to solve the above equations , to achieve phase detection to achieve precise displacement measurement. The invention can solve the problems of low measurement accuracy and inability to meet small range measurement in the traditional phase detection technology based on time measurement, and the measurement method can be applied to systems such as precision manufacturing equipment or photolithography machines.
Description
technical field [0001] The invention relates to a high-resolution phase detection method based on a plane grating laser interferometer, in particular to a high-resolution phase detection method based on a dual-frequency plane grating laser interferometer, and belongs to the technical field of precision displacement measurement. Background technique [0002] Precision manufacturing is an important pillar of a region or even a country's economic development, and it is one of the main symbols to measure the development of a country's manufacturing level. Precision displacement measurement technology is one of the most critical technologies. Precision displacement measurement technology is the basis for making precision instruments and determines the manufacturing accuracy of the entire manufacturing industry. At this stage, most precision displacement measurement systems use advanced optical-based displacement measurement technologies such as grating measurement systems or lase...
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IPC IPC(8): G01B11/02
CPCG01B11/02G01B9/02007G01B9/02028G01B9/02027
Inventor 朱煜胡金春韩如锦田畅张鸣尹文生成荣徐登峰
Owner TSINGHUA UNIV