Outline scanning measuring method and device of large-scale sphere and aspheric surface

Abstract

The invention mainly aims at precision testing of characteristic parameters such as facial form and surface roughness of a large-scale sphere and an aspheric surface and particularly relates to an outline scanning measuring method and a device of the large-scale sphere and the aspheric surface. The large-scale sphere and the aspheric surface can separate an axial end jump error and a rectilinear motion guide rail error in an X direction in real-time, achieve real-time self-detaching of the axial end jump error of a drive shaft system and an aspheric surface outline measurement value, adopt a reference beam with high direction stability to monitor and compensate a guide rail motion error in real-time and be capable of conduct autonomous detaching and real-time compensation on the high-precision large-scale sphere and the aspheric surface such as the axial end jump error of the drive shaft system and the rectilinear motion guide rail error in the X direction. The outline scanning measuring method and the device of the large-scale sphere and the aspheric surface provides a new method and a new technology for high-accuracy measurement of parameters such as the facial forms of the large-scale sphere or aspheric surface, surface roughness, radius of curvature and the like.

Description

technical field [0001] The present invention is mainly aimed at the precise detection of parameters such as the surface shape and surface roughness of large-diameter spherical and aspheric components, and particularly relates to a large-diameter spherical and aspheric profile scanning measurement method and device that can separate axial end jump errors in real time. It belongs to the technical field of ultra-precision measurement. technical background [0002] With the development of major cutting-edge technologies such as laser nuclear fusion and space telescopic observation, the demand for large spherical and aspheric components is becoming more and more extensive, and the requirements for parameters such as surface shape and surface roughness during processing are also increasing. If there is no high-precision surface profile detection method and device matching the processing accuracy of large spherical and aspheric elements, the ultra-precision processing accuracy requ...

AI Technical Summary

Problems solved by technology

[0005] Based on the above problems, the present invention proposes a large-scale spherical aspheric profile scanning measurement method and device, which effectively breaks through the existing large-diameter aspheric profile scanning measurement method that is restricted by the axial end jump error of the rotary shaft system and the motion error of the X-direction precision guide rail. Difficult to improve the technical bottleneck of measurement accuracy

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