Outline scanning measuring method and device of large-scale sphere and aspheric surface

A measuring device and aspheric technology, applied in the field of ultra-precision measurement, can solve problems such as difficulty in improving measurement accuracy, and achieve the effect of ultra-precision measurement

Inactive Publication Date: 2013-05-15
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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Problems solved by technology

[0005] Based on the above problems, the present invention proposes a large-scale spherical aspheric profile scanning measurement method and device, which effectively breaks through the existing large-diameter aspheric profile scanning measurement method that is restricted by the axial end jump error of the rotary shaft system and the motion error of the X-direction precision guide rail. Difficult to improve the technical bottleneck of measurement accuracy

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  • Outline scanning measuring method and device of large-scale sphere and aspheric surface
  • Outline scanning measuring method and device of large-scale sphere and aspheric surface
  • Outline scanning measuring method and device of large-scale sphere and aspheric surface

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Embodiment Construction

[0037] A schematic structural view of an embodiment of a large-scale spherical aspheric profile scanning measurement device of the present invention is as follows image 3 As shown, it includes a laser interferometer 1 for displacement measurement, a pyramid measuring mirror 2, a precision air-floating linear guide system 3, an instrument support 4, an indexing angle generator 5, an error separation turntable 6, a precision air-floating rotary shaft system 7, Drive motor 8, instrument base 9, instrument table 10, aspherical workpiece to be measured 11, large-range displacement sensor 12, spot position detector 13, high-directional stability reference beam generating device 14, precision rotation angle measuring device 15, main Grating ruler 16, auxiliary grating ruler 17, reference marks 18 and 19, auxiliary grating reading head 20, main grating reading head 21.

[0038] Among them, the precision air-floating rotary shaft system 7 is used as the rotary reference of the instrum...

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Abstract

The invention mainly aims at precision testing of characteristic parameters such as facial form and surface roughness of a large-scale sphere and an aspheric surface and particularly relates to an outline scanning measuring method and a device of the large-scale sphere and the aspheric surface. The large-scale sphere and the aspheric surface can separate an axial end jump error and a rectilinear motion guide rail error in an X direction in real-time, achieve real-time self-detaching of the axial end jump error of a drive shaft system and an aspheric surface outline measurement value, adopt a reference beam with high direction stability to monitor and compensate a guide rail motion error in real-time and be capable of conduct autonomous detaching and real-time compensation on the high-precision large-scale sphere and the aspheric surface such as the axial end jump error of the drive shaft system and the rectilinear motion guide rail error in the X direction. The outline scanning measuring method and the device of the large-scale sphere and the aspheric surface provides a new method and a new technology for high-accuracy measurement of parameters such as the facial forms of the large-scale sphere or aspheric surface, surface roughness, radius of curvature and the like.

Description

technical field [0001] The present invention is mainly aimed at the precise detection of parameters such as the surface shape and surface roughness of large-diameter spherical and aspheric components, and particularly relates to a large-diameter spherical and aspheric profile scanning measurement method and device that can separate axial end jump errors in real time. It belongs to the technical field of ultra-precision measurement. technical background [0002] With the development of major cutting-edge technologies such as laser nuclear fusion and space telescopic observation, the demand for large spherical and aspheric components is becoming more and more extensive, and the requirements for parameters such as surface shape and surface roughness during processing are also increasing. If there is no high-precision surface profile detection method and device matching the processing accuracy of large spherical and aspheric elements, the ultra-precision processing accuracy requ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 赵维谦侯茂盛邱丽荣王帆
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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