A detection device with vibration isolation nested structure

A technology of detection device and nested structure, which is applied to measurement devices, uses optical devices to transmit sensing components, measurement instrument components, etc. Quiet and improved detection accuracy

Active Publication Date: 2021-07-13
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The embodiment of the present invention provides a detection device with a vibration isolation nested structure, which is used to solve the problem that the optical detection system in the prior art usually installs a vibration isolator for the vibration-sensitive parts, but does not separate the pipes and cables. Isolation, resulting in technical problems that have a great impact on detection accuracy

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  • A detection device with vibration isolation nested structure
  • A detection device with vibration isolation nested structure
  • A detection device with vibration isolation nested structure

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Embodiment 1

[0028] figure 1 It is a structural schematic diagram of a detection device with a vibration isolation nested structure in the implementation of the present invention. An embodiment of the present invention provides a detection device with a vibration isolation nested structure, and the device includes:

[0029] A micro-environment control module, the micro-environment control module includes an upper layer air bath unit 3 and a lower layer air bath unit 5, wherein the upper layer air bath unit 3 is located on the upper layer of the detection device, and the lower layer air bath unit 5 is located on the upper layer of the detection device Below the upper layer air bath unit 3;

[0030] An optical detection bench with a vibration isolator 10, the optical detection bench with a vibration isolator 10 is arranged between the upper air bath unit 3 and the lower air bath unit 5;

[0031] The displacement platform module 11, the displacement platform module 11 is located below the mi...

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Abstract

The invention discloses a detection device with a vibration isolation nested structure, which relates to the technical field of optical performance parameter detection. The device comprises: a micro-environment control module, the micro-environment control module includes an upper air bath unit and a lower air bath unit , wherein the upper air bath unit is located on the upper layer of the detection device, and the lower air bath unit is located below the upper air bath unit; an optical detection stand with a vibration isolator, the The optical detection bench is arranged between the upper air bath unit and the lower air bath unit; a displacement stage module, the displacement stage module is located below the micro-environment control module, and is connected with the micro-environment control module and the The optical inspection benches with vibration isolators are independent of each other. It achieves the technical effect of blocking the vibration generated by the micro-environment control module, realizing the absolute quietness of the detection environment, and improving the detection accuracy.

Description

technical field [0001] The invention relates to the technical field of optical performance parameter detection, in particular to a detection device with a vibration isolation nested structure. Background technique [0002] With the rapid development of computer technology and the wide application of CCD, CMOS and other semiconductor photoelectric conversion sensors and image acquisition devices, precision optical measurement has entered a stage based on image analysis and image processing. To achieve the high precision of optical detection, the detection system must not only work in a constant temperature, constant humidity, and constant pressure environment, but also need to isolate and control vibration to make the detection environment reach an absolutely quiet level. Especially for an optical detection system with a micro-environment control module, there will be more pipes, cables, and air bath units, which will make the system more complicated, and these will introduce...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/26G01D11/00
CPCG01D5/26G01D11/00
Inventor 齐威孟璐璐宗明成齐月静李璟王宇卢增雄杨光华张清洋苏佳妮陈进新
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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