Detection device with vibration isolation nested structure

Abstract

The invention discloses a detection device with a vibration isolation nested structure, and relates to the technical field of optical performance parameter detection. The detection device comprises amicroenvironment control module, an optical detection stand with a vibration isolator, and a displacement table module, wherein the microenvironment control module comprises an upper-layer gas-bath unit and a lower-layer gas-bath unit, wherein the upper-layer gas-bath unit is located on the upper layer of the detection device, and the lower-layer gas-bath unit is located below the upper-layer gas-bath unit; the optical detection stand with the vibration isolator is arranged between the upper-layer gas-bath unit and the lower-layer gas-bath unit; and the displacement table module is located below the microenvironment control module, and is independent from the microenvironment control module and the optical detection stand with the vibration isolator. The technical effects that vibration generated by the microenvironment control module is blocked, absolute silence of the detection environment is achieved, and the detection accuracy is improved are achieved.

Description

technical field [0001] The invention relates to the technical field of optical performance parameter detection, in particular to a detection device with a vibration isolation nested structure. Background technique [0002] With the rapid development of computer technology and the wide application of semiconductor photoelectric conversion sensors and image acquisition devices such as CCD and CMOS, precision optical measurement has entered a stage based on image analysis and image processing. In order to achieve the high precision of optical detection, the detection system not only has to work in the environment of constant temperature, humidity and pressure, but also needs to isolate and control the vibration, so that the detection environment can reach an absolutely quiet level. Especially for an optical detection system with a micro-environment control module, there will be more pipes, cables and air bath units, which will make the system more complicated, and these will in...

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Problems solved by technology

[0005] The embodiment of the present invention provides a detection device with a vibration isolation nested structure, which is used to solve the problem that the optical detection system in the prior art usually installs a vibration isolator for the vibration-sensitive parts, but does not separate the pipes and cables. Isolation, resulting in technical problems that have a great impact on detection accuracy

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