Sealing structure for sealing inner quartz tube, process equipment and assembling method
A technology of sealing structure and process equipment, which is applied in the direction of engine sealing, mechanical equipment, chemical instruments and methods, etc., can solve the problems that the sealing components cannot be directly fixed and increase the difficulty of assembly, so as to avoid the narrow assembly space and the difficulty of assembly Effect
Active Publication Date: 2019-10-11
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
Since the sealing assembly adopts the reverse installation method from top to bottom, due to the effect of gravity, the sealing assembly in the sealing groove cannot be directly fixed in the sealing groove, and can only be compressed by the sealing ring in the sealing assembly in the sealing groove. Its fixed installation provides support, which increases the difficulty of assembly
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[0031] In order to enable those skilled in the art to better understand the technical solution of the present invention, the sealing structure for sealing the inner quartz tube provided by the present invention, the process equipment and the assembly method of the process equipment provided by the present invention will be described in detail below in conjunction with the accompanying drawings .
[0032] A sealing structure for sealing the inner quartz tube, such as Figure 1-6 As shown, the sealing structure includes an annular mounting member 110, a first sealing assembly, an annular support 140 and a second sealing assembly. Wherein, the annular mounting part 110 is sleeved on the outside of the inner quartz tube 100, and a first boss 111 is provided on the inner peripheral wall of the annular mounting part 110; the first sealing assembly is arranged on the first boss 111 for Seal the gap between the inner peripheral wall of the ring mounting part 110 and the outer periphe...
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The invention provides a sealing structure for sealing an inner quartz tube, process equipment and an assembling method. The sealing structure comprises an annular mounting part, a first sealing assembly, an annular supporting part and a second sealing assembly, wherein the annular mounting part is arranged on the outer side of the inner quartz tube in a sleeving mode, and a first boss is arrangedon the inner circumferential wall of the annular mounting part; the first sealing assembly is arranged on the first boss and is used for sealing a clearance between the inner circumferential wall ofthe annular mounting part and the outer circumferential wall of the inner quartz tube; the annular supporting part is detachably arranged at the bottom of the annular mounting part, and comprises a bottom supporting part and a lateral supporting part, wherein the bottom supporting part is used for supporting the inner quartz tube, and the lateral supporting part is arranged above the bottom supporting part and arranged on the outer side of the inner quartz tube in a sleeving mode; and the second sealing assembly is arranged on the lateral supporting part and is positioned between the bottom supporting part and the inner quartz tube, and the second sealing assembly is used for sealing the clearance between the inner circumferential wall of the annular supporting part and the outer circumferential wall of the inner quartz tube. By the adoption of the sealing structure for sealing the inner quartz tube, the problems of assembly difficulty, low efficiency and other problems caused by gravity when the sealing assemblies are mounted from top to bottom are effectively solved.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a sealing structure, process equipment and assembly method for sealing an inner quartz tube. Background technique [0002] At present, the process equipment that is widely used to synthesize semiconductor (such as silicon carbide, gallium nitride) single crystal materials is mainly a growth furnace, and the furnace of the growth furnace is used to provide the high temperature, high vacuum and high cleanliness environment required for the synthesis of semiconductors. . The furnace includes a plurality of sealing structures for sealing the inner quartz tube, such as the outer quartz tube, the inner quartz tube and the sealing structure, etc., wherein the sealing structure (such as a bushing, a sealing ring, a gasket, etc.) Water and air enter the quartz tube. [0003] In the prior art, the sealing structure used to seal the inner quartz tube mainly includes an annular m...
Claims
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IPC IPC(8): F16J15/06C30B35/00
CPCC30B35/00F16J15/067
Inventor 王建
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD