Multi-degree-of-freedom precision control platform
A technology of precise control and degree of freedom, applied in the direction of control using feedback, can solve the problem of the control platform stroke and accuracy cannot be balanced, and achieve the effect of solving the problem that the precision and stroke cannot be balanced, and solving the single dimension.
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Embodiment 1
[0014] like figure 1 As shown, the present invention proposes a multi-degree-of-freedom precision control platform, which includes: a precision six-dimensional parallel positioning platform 1, an X-direction linear guide rail 2, a Y-direction linear guide rail 3, a Z-direction linear guide rail 4, and a precise six-dimensional parallel positioning platform The controller 5, the linear guide controller 6 and the power control box 7 also include a main control computer 8.
[0015] The multi-degree-of-freedom precision control platform adopts a combination of macro and micro. The X-direction linear guide 2 is located on the bottom side, with a stroke of 200mm, a positioning accuracy of better than 20μm, and a load of 30Kg. The Y-direction linear guide 3 is fixed on the table of the X-direction linear guide 2, parallel to the table of the X-direction linear guide 2 and the moving direction is perpendicular to the moving direction of the X-direction linear guide 2, the stroke is 3...
Embodiment 2
[0019] like figure 2 As shown, the present invention also proposes a multi-degree-of-freedom precision closed-loop control platform, which includes: a precision six-dimensional parallel positioning platform 1, an X-direction linear guide rail 2, a Y-direction linear guide rail 3, a Z-direction linear guide rail 4, a precision six-dimensional parallel Positioning table controller 5, linear guide rail controller 6, power control box 7 and main control computer 8, also includes X-direction linear guide rail grating ruler 9, X-direction linear guide rail grating ruler reading head 10, Y-direction linear guide rail grating ruler 11, Y-direction linear guide grating ruler reading head 12, Z-direction linear guide rail grating ruler 13, Z-direction linear guide rail grating ruler reading head 14.
[0020] The multi-degree-of-freedom precision control platform adopts a combination of macro and micro. The X-direction linear guide 2 is located on the bottom side, with a stroke of 200m...
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