Control Method Of Piezoelectric Driving Device And Piezoelectric Driving Device
A technology of piezoelectric drive and control method, applied in piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, etc., can solve the problem of driving speed Lowering and other issues
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[0015] Next, the method of controlling the piezoelectric drive device and the piezoelectric drive device according to the present invention will be described in detail based on preferred embodiments shown in the drawings.
[0016] figure 1 It is a plan view showing the piezoelectric drive device according to the preferred embodiment of the present invention. figure 2 as well as image 3 It is a plan view explaining the driving of the piezoelectric actuator. Figure 4 is a graph showing the drive signal applied to the piezoelectric actuator. Figure 5 It is a block diagram showing the circuit configuration of the control device. Figure 6 as well as Figure 7 It is a diagram for explaining the control method of the controller.
[0017] In addition, in Figure 1 to Figure 3 Among them, for the convenience of description, the three mutually orthogonal axes are X-axis, Y-axis and Z-axis, the direction along the X-axis is referred to as the X-axis direction, and the directio...
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