Substrate surface oxide treatment device

A treatment device and substrate surface technology, which is applied in the field of substrate surface oxide treatment devices, can solve problems such as unreasonable structure, looseness, and inability to ensure

Pending Publication Date: 2020-10-20
杭州金固环保设备科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The main purpose of the present invention is to provide a substrate surface oxide treatment device to solve the problem that the structure of the substrate surface oxide treatment device in the prior art is unreasonable, and the oxide treatment group of the s

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Embodiment Construction

[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0033] In order to solve the unreasonable structure of the substrate surface oxide treatment device in the prior art, it is impossible to ensure that the oxide treatment group of the substrate surface oxide treatment device can effectively loosen the oxide scale on the substrate surface,...

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Abstract

The invention provides a substrate surface oxide treatment device which comprises a shell and a first oxide treatment group. The shell is provided with an operation cavity, and the first oxide treatment group is connected with the shell and communicates with the operation cavity, wherein the plane where the position, provided with the first oxide treatment group, of the shell is located and the horizontal plane form an included angle, and the axis of the first oxide treatment group and the horizontal plane form an included angle, so that a first beating angle is formed at a first ejection endof the first oxide treatment group, wherein the first ejection end is used for ejecting mortar mixed liquid to the first surface of a substrate so as to remove the scale of the first surface. The problems that the structure of a substrate surface oxide treatment device in the prior art is unreasonable, and an oxide treatment group of the substrate surface oxide treatment device cannot be ensured to effectively loosen the oxide scale on the surface of the substrate, so that the surface oxide scale treatment reliability of the substrate surface oxide treatment device is lowered are solved.

Description

technical field [0001] The invention relates to the technical field of substrate surface treatment equipment, in particular to a substrate surface oxide treatment device. Background technique [0002] In the prior art, the structure of the substrate surface oxide treatment device is unreasonable, and it is impossible to ensure that the oxide treatment group of the substrate surface oxide treatment device can effectively loosen the oxide scale on the substrate surface, thereby reducing the oxide scale on the substrate surface. Reliability of surface oxide scale treatment of processing equipment. Contents of the invention [0003] The main purpose of the present invention is to provide a substrate surface oxide treatment device to solve the problem that the structure of the substrate surface oxide treatment device in the prior art is unreasonable, and the oxide treatment group of the substrate surface oxide treatment device cannot be ensured. The oxide scale on the surface ...

Claims

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Application Information

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IPC IPC(8): C23G1/00
CPCC23G1/00
Inventor 王少峰曹云飞倪涛李泳杰何龙
Owner 杭州金固环保设备科技有限公司
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