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data processing method

A data processing and data technology, applied in the field of measurement, can solve problems such as the content of the first chemical bond without the measurement formula

Active Publication Date: 2021-07-06
YANGTZE MEMORY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, infrared multiple attenuated total reflection sampling is a relatively new sampling method, and there is no corresponding measurement formula to calculate the content of the first chemical bond in the film to be sampled

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Embodiment Construction

[0037] In order to make the technical solutions and advantages of the embodiments of the present invention more clear, the specific technical solutions of the invention will be further described in detail below in conjunction with the drawings in the embodiments of the present invention.

[0038] The film to be sampled in the embodiment of the present invention includes a film formed during the manufacturing process of a semiconductor device. The embodiment of the present invention does not limit the material of the film to be sampled. In the following description, a silicon nitride (SiN) film is taken as an example. illustrate.

[0039] Molecules in substances can selectively absorb certain wavelengths of infrared rays, resulting in the transition of molecular vibrational energy levels and rotational energy levels. Detecting the absorption of infrared rays can obtain the infrared absorption spectrum of the substance, thereby obtaining the bonding information of the molecules ...

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Abstract

An embodiment of the present invention provides a data processing method, which uses a first test method for sampling by infrared transmission to measure infrared absorption spectra of multiple film samples, and obtains a first data set corresponding to a first chemical bond in the film samples; Wherein, based on the data in the first data set, using the first measurement formula, the content of the first chemical bond in the film sample can be obtained; using the second test method for sampling by infrared multiple attenuation total reflection to measure the Infrared absorption spectra of a plurality of film samples to obtain a second data set corresponding to the first chemical bond; determine the degree of correlation between the data in the first data set and the data in the second data set; based on the degree of correlation and The first measurement formula obtains a second measurement formula; wherein, based on the data in the second data set and in combination with the second measurement formula, the content of the first chemical bond in the film sample can be obtained.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a data processing method. Background technique [0002] Each molecule has a unique infrared absorption spectrum determined by its composition and structure. Based on this, the infrared absorption spectrum can be used to analyze and identify the material molecules, such as to obtain the bonding information of the molecules in the material. Specifically, a beam of infrared rays of different wavelengths is irradiated on the molecules of a substance, and infrared rays of certain specific wavelengths are absorbed to form the infrared absorption spectrum of the molecules. In practical applications, infrared transmission sampling and infrared multiple attenuation total reflection sampling can be used to measure the infrared absorption spectrum of the film to be sampled. [0003] In related technologies, the infrared transmission sampling method is relatively mature. After obtainin...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G16C10/00G16C60/00G01N21/3563
CPCG01N21/3563G16C10/00G16C60/00
Inventor 江佩佘菀馨锁志勇
Owner YANGTZE MEMORY TECH CO LTD