Multi-working-mode plasma power supply with adjustable energy density

Abstract

The invention discloses a multi-working-mode plasma power supply with adjustable energy density. The power supply comprises a main circuit and a control circuit. The main circuit comprises a rectification filtering module, a full-bridge inversion module, a primary side resonance inductance module and an intermediate frequency transformer module which are connected in sequence. The control circuitcomprises a DSP controller module and a signal detection module. The improved driving capability of the plasma power supply can be improved, the adaptability of the plasma power supply to various plasma generators is enhanced, the power supply efficiency is improved, the dynamic characteristics of the power supply are improved, and the software and hardware cost is reduced.

Description

technical field [0001] The invention belongs to the field of plasma, in particular to the field of plasma power supply, in particular to a multi-working mode plasma power supply with adjustable energy density. Background technique [0002] Plasma technology is widely used in electronics, communications, automobiles, textiles, biomedical and other fields. The excitation methods of plasma mainly include methods such as electric field, light, high-energy rays or high temperature. The preparation methods in industry often use high-voltage electricity as excitation, and the electrons, ions or high-energy particles in the gas are accelerated by the electric field to make them collide with each other. The gas is ionized, thereby producing a plasma. [0003] Due to the sharp instantaneous change of the plasma load, higher requirements are put forward for the dynamic response of the power system. The traditional plasma power supply adopts high-voltage DC excitation, which has diffic...

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Problems solved by technology

[0005] According to the prior art literature, the plasma power supply has large volume, low efficiency, low power factor, and slow dynamic response (Chen Kansong, Gu Haoshuang, Sun Fenglou, etc. A new type of medium-frequency AC plasma power supply [J ].Journal of Circuits and Systems, 2006(04):78-81.), issues such as weak load adaptability (Ben Hongqi, Jin Zumin, Hao Yanling. Research on micro-plasma oxidation power supply in peak current control mode[J]. Power Electronics Technology, 2004 (02):59-61.)

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