Liquid tungsten hexafluoride sampling device

Abstract

The invention discloses a liquid tungsten hexafluoride sampling device and relates to the technical field of chemical engineering sampling. The sampling device comprises a sampling pipe assembly, a connecting pipe, a sampling head assembly and a purification assembly, wherein the sampling pipe assembly and the sampling head assembly are connected through a connecting pipe, and a purification assembly is mounted on the sampling head assembly; the sampling pipe assembly is used for driving the sampling head assembly to perform premixing and diffusion type liquid absorption on liquid tungsten hexafluoride, and the purification assembly is used for purifying gaseous tungsten hexafluoride diffused by the liquid tungsten hexafluoride; according to the sampling device, pre-mixing and diffusion type liquid absorption of samples can be realized, so sampling precision is improved; meanwhile, harmful gas in the to-be-sampled liquid can be synchronously absorbed, so the harmful gas is prevented from leaking, and safe sampling is facilitated.

Description

technical field [0001] The invention relates to the technical field of chemical sampling, in particular to a liquid tungsten hexafluoride sampling device. Background technique [0002] Tungsten hexafluoride, the molecular formula is WF6, the molecular weight is 297.830; it is solid or colorless gas or light yellow liquid, in solid state, it is deliquescent white crystal, easy to smoke in humid air, as a fluorinating agent, It is mainly used for chemical vapor deposition of tungsten; during the development process, liquid tungsten hexafluoride needs to be sampled and tested, but the molecules diffused from the tungsten hexafluoride liquid are mixed into the air and are likely to cause harm to the human body. [0003] The sampling devices used for chemical liquids such as tungsten hexafluoride in the prior art mainly have the following disadvantages: [0004] (1) Tungsten hexafluoride will precipitate to a certain extent during sampling, and the existing sampling device canno...

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Problems solved by technology

[0002] Tungsten hexafluoride, the molecular formula is WF6, the molecular weight is 297.830; it is solid or colorless gas or light yellow liquid, in solid state, it is deliquescent white crystal, easy to smoke in humid air, as a fluorinating agent, Mainly used for chemical vapor deposition of tungsten; liquid tungsten hexafluoride needs to be sampled and tested during the development process, but molecules diffused from tungsten hexafluoride liquid are easily mixed into the air and cause harm to the human body

[0004] (1) Tungsten hexafluoride will precipitate to a certain extent during sampling, and the existing sampling device cannot realize the pre-mixing of the sample and the diffusion suction, resulting in low sampling accuracy; (2) the existing sampling device When the device is sampling, the gas mixed with chemical liquid molecules is easy to contact with the outside air, which leads to the leakage of harmful gas (gas tungsten hexafluoride formed by the vaporization of liquid tungsten hexafluoride), and cannot be improved through structural improvement. Simultaneous absorption of leaked harmful gas is realized while the sampling tube is drawn out, so as to achieve the purpose of safe sampling

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