Gradient index anti-reflection film and its preparation method and application

A technology of graded refractive index and refractive index, applied in the field of graded refractive index anti-reflection film and its preparation, can solve problems such as Fresnel reflection loss, achieve the effect of eliminating reflection loss, realizing deposition, and easy deposition

Active Publication Date: 2022-02-15
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The main purpose of the present invention is to provide a graded index anti-reflection film and its preparation method and application. The technical problem to be solved is how to eliminate the Fresnel reflection loss caused by the mismatch of refractive index

Method used

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  • Gradient index anti-reflection film and its preparation method and application
  • Gradient index anti-reflection film and its preparation method and application
  • Gradient index anti-reflection film and its preparation method and application

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preparation example Construction

[0075] Such as figure 1 As shown, an embodiment of the present invention proposes a method for preparing a graded index antireflection film, which includes the following steps:

[0076] Step 1: Obtain the first functional layer 3 and the second functional layer 4;

[0077] In this step 1, the refractive index difference between the first functional layer and the second functional layer is relatively large.

[0078] The large difference in refractive index between the first functional layer and the second functional layer will cause a large loss of Fresnel reflection. In this embodiment, a gradient index anti-reflection film is prepared in the middle to reduce Fresnel reflection. loss. In some preferred embodiments, the first functional layer and the second functional layer are an input window and a photocathode, respectively. In this embodiment, a graded index anti-reflection film is prepared between the input window and the photocathode to eliminate the reflection loss bet...

Embodiment 1

[0120] This embodiment 1 provides a method for preparing a graded index antireflection film, and its specific implementation steps are as follows:

[0121] Step 1. Select ZrO 2 As the graded index layer, select Al 2 o 3 As a refractive index limiting layer, it is prepared by chemical vapor deposition, ZrO 2 The deposition rate is 6nm / min, Al 2 o 3 The deposition rate is 1nm / min;

[0122] Step 2. Clean the input window with deionized water, ethanol, and isopropanol and place it in the chemical vapor deposition chamber. Deposit the first group of anti-reflection coatings on the input window according to the operation steps of chemical vapor deposition. The deposition time of the group anti-reflection coating layer is 1 minute, and the deposition time of the refractive index limiting layer is 2 minutes;

[0123] Step 3, depositing the second group of anti-reflection coatings, the deposition time of the refractive index gradient layer of the second group of anti-reflection coa...

Embodiment 2

[0131] This embodiment 2 provides a method for preparing a graded-index antireflection film, and its specific implementation steps are as follows:

[0132] Step 1. Select TiO 2 As the graded index layer, choose HfO 2 As a refractive index limiting layer, prepared by atomic layer deposition (ALD), TiO 2 The deposition rate is 0.05nm / min, HfO 2 The deposition rate is 0.02nm / min;

[0133] Step 2. Clean the input window with deionized water, ethanol, and isopropanol and place it in the ALD chamber. Deposit the first group of anti-reflection coatings on the input window according to the ALD operation steps. The first group of anti-reflection coatings The deposition time of the graded refractive index layer of the layer is 10 minutes, and the deposition time of the refractive index limiting layer is 10 minutes;

[0134] Step 3, depositing the second group of anti-reflection coatings, the deposition time of the refractive index gradient layer of the second group of anti-reflectio...

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Abstract

The invention relates to a graded refractive index anti-reflection film and its preparation method and application. The graded index antireflection film includes at least three groups of antireflection film layers; each group of antireflection film layers includes a layer of graded refractive index layer and a layer of restricted refractive index layer; from one side of the graded index antireflection film to the other side, The refractive index of the anti-reflection coating layer is distributed stepwise or gradually, and the refractive index limited layer and the refractive index gradient layer are alternately stacked; index, the material of the refractive index limiting layer is selected from Al 2 o 3 , HfO 2 、BaF 2 , MgF 2 and SiO 2 At least one of them; the material of the graded index layer is selected from optical materials with adjustable index of refraction. In the process of preparing the graded-refractive-index antireflection film, the method of the present invention can regulate the thickness of the graded-refractive-index layer in each group of antireflective film layers to precisely control the refractive index by introducing the refractive-index limiting layer.

Description

technical field [0001] The invention relates to the technical field of optical element films, in particular to a graded refractive index antireflection film and its preparation method and application. Background technique [0002] The low-light image intensifier has the function of enabling the human eye to see objects at night, and its structure includes an input window, a photocathode, MCP, a fluorescent screen, an output window, a tube shell, and a high-voltage power supply. The input window plays the role of inputting the optical image and supporting the photocathode, and the photocathode plays the role of photoelectric conversion, usually using Na 2 KSb polyalkali cathode or GaAs single crystal semiconductor cathode. The sensitivity of the photocathode is an important indicator for evaluating the performance of low-light image intensifiers. There are three main ways to improve the sensitivity of the cathode: increasing the absorption of incident photons and the formati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/40C23C16/455C23C14/08C23C14/24C23C14/54C23C14/06C23C16/52G02B1/115
CPCC23C16/405C23C16/403C23C16/45525C23C14/083C23C14/085C23C14/0694C23C14/24C23C14/54C23C16/52G02B1/115
Inventor 杨金慧刘辉薄铁柱马婧李庆郑京明吕学良李开宇王乔
Owner CHINA BUILDING MATERIALS ACAD
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