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Chip-detecting method, chip-detecting structure and chip-carrying structure

A technology for chip detection and carrying structure, which is applied in semiconductor/solid-state device testing/measurement, electrical measurement, measuring devices, etc., can solve the problems of reducing the detection efficiency of light-emitting diode chips and the difficulty of optical detection of light-emitting diode chips, etc.

Pending Publication Date: 2021-12-10
ASTI GLOBAL INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the prior art, multiple light-emitting diode chips can be produced on a wafer, but multiple light-emitting diode chips must be cut from the wafer before they can be optically inspected, which not only causes the optical inspection of the light-emitting diode chips Difficulty, also reduces the detection efficiency of LED chips

Method used

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  • Chip-detecting method, chip-detecting structure and chip-carrying structure
  • Chip-detecting method, chip-detecting structure and chip-carrying structure
  • Chip-detecting method, chip-detecting structure and chip-carrying structure

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no. 1 example

[0025] refer to Figure 1 to Figure 11 As shown, the first embodiment of the present invention provides a chip detection method, which at least includes the following steps: first, coordinate Figure 1 to Figure 3 As shown, a chip detection structure 1, a chip carrying structure 2 and a plurality of welding material groups 3 are provided, the chip detection structure 1 includes a plurality of micro heater groups 11, the chip carrying structure 2 is used to carry a plurality of chips C, and a plurality of The welding material group 3 is arranged between the chip carrying structure 2 and the chip detection structure 1 (step S100); then, cooperate Figure 1 to Figure 4 As shown, the chip carrying structure 2 and the chip testing structure 1 are brought close to each other, so that each welding material group 3 contacts the chip carrying structure 2 and the chip testing structure 1 at the same time, and each welding material group 3 includes a low temperature welding material grou...

no. 2 example

[0036] refer to figure 1 , Figure 11 and Figure 12 As shown, the second embodiment of the present invention provides a chip detection method. Depend on Figure 12 and Figure 10 It can be seen from the comparison that the biggest difference between the second embodiment and the first embodiment is: after the step S108 of separating a plurality of good chips (C-GO) and the chip detection structure 1, the chip detection method of the second embodiment further includes : First, match figure 1 and Figure 12 As shown, a plurality of good chips (C-GO) are transferred to a circuit substrate P sequentially or simultaneously (step S110 (B)); then, coordinate figure 1 , Figure 11 and Figure 12As shown, through a material removal module R (for example, the photoresist stripping liquid provided by the photoresist stripping liquid supply equipment, which can be an organic solvent or an inorganic solvent), to remove a chip carrying substrate 20 of the chip carrying structure 2 ...

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Abstract

A chip-detecting method, a chip-detecting structure and a chip-carrying structure are provided. The chip-detecting method includes providing a chip-detecting structure including a plurality of micro heater groups, a chip-carrying structure for carrying a plurality of chips, and a plurality of soldering material groups disposed between the chip-carrying structure and the chip-detecting structure; placing the chip-carrying structure and the chip-detecting structure adjacent to each other, so that each of the soldering material groups simultaneously contact the chip-carrying structure and the chip-detecting structure; respectively curing the low-temperature soldering material groups by heating of the micro heater groups, so that the chips are electrically connected to the chip-detecting structure respectively through the low-temperature soldering material groups that have been cured; and then detecting the chips so as to divide the chips into a plurality of good chips and a plurality of bad chips.

Description

technical field [0001] The invention relates to a detection method, a detection structure and a carrying structure, in particular to a chip detection method, a chip detection structure and a chip carrying structure. Background technique [0002] In the prior art, multiple light-emitting diode chips can be produced on a wafer, but multiple light-emitting diode chips must be cut from the wafer before they can be optically inspected, which not only causes the optical inspection of the light-emitting diode chips The degree of difficulty also reduces the detection efficiency of the light-emitting diode chip. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a chip detection method, a chip detection structure and a chip carrying structure for the deficiencies of the prior art. [0004] In order to solve the above technical problems, one of the technical solutions adopted by the present invention is to provide a chip det...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/28G01R1/04
CPCG01R31/2884G01R31/2887G01R1/0416H01L21/67242H01L24/00H01L22/20H01L2224/95H01L2224/81191H01L33/0095H01L2933/0066H01L33/62
Inventor 廖建硕张正杰
Owner ASTI GLOBAL INC