Unlock instant, AI-driven research and patent intelligence for your innovation.

Multi-stage, multi-zone substrate-positioning systems

A region and substrate technology, applied in the direction of discharge tubes, electrical components, circuits, etc., can solve the problems of slow movement of the stage and the cost of 200 milliseconds to 500 milliseconds

Pending Publication Date: 2022-01-14
KLA CORP
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This weight causes the stage to move slowly (eg, it takes 200ms to 500ms to move a few millimeters) and to have a long settling time (during which the vibration decays)

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Multi-stage, multi-zone substrate-positioning systems
  • Multi-stage, multi-zone substrate-positioning systems
  • Multi-stage, multi-zone substrate-positioning systems

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0026] Reference will now be made in detail to various embodiments, examples of which are illustrated in the accompanying drawings. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of various described embodiments. It will be apparent, however, to one of ordinary skill in the art that various described embodiments may be practiced without these specific details. In other instances, well-known methods, procedures, components, circuits and networks have not been described in detail so as not to unnecessarily obscure aspects of the embodiments.

[0027] figure 1 is a cross-sectional view of a chamber 102 containing a multi-stage, multi-zone substrate positioning system, according to some embodiments. The substrate positioning system includes a first x-y translation stage 104 , a second x-y translation stage 106 and a chuck 108 . A second x-y translation stage 106 is located above and coupled to (eg, di...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A first x-y translation stage, a second x-y translation stage, and a chuck are disposed in a chamber. The chuck is situated above and coupled to the second x-y translation stage, which is situated above and coupled to the first x-y translation stage. The chuck is configured to support a substrate and to be translated by the first and second x-y stages in x-and y-directions, which are substantially parallel to a surface of the chuck on which the substrate is to be mounted. A first barrier and a second barrier are also disposed in the chamber. The first barrier is coupled to the first x-y translation stage to separate a first zone of the chamber from a second zone of the chamber. The second barrier is coupled to the second x-y translation stage to separate the first zone of the chamber from a third zone of the chamber.

Description

[0001] Related applications [0002] This application claims priority to U.S. Provisional Patent Application No. 60 / 862,895, filed June 18, 2019, which is incorporated by reference in its entirety for all purposes. technical field [0003] The present disclosure relates to systems for positioning substrates, such as semiconductor wafers or reticles, and more particularly, to substrate positioning systems having multiple translation stages. Background technique [0004] A translation stage is used in a chamber, such as a vacuum chamber, to translate the substrate. For example, an x-y-z translation stage can be used in a vacuum chamber to translate a substrate in three directions (eg, x-, y-, and z-directions). This stage can be used in a scanning electron microscope (SEM). Translating the stage uses a lubricant that outgasses and thus contaminates the chamber and substrate. Plastic materials in the translation stage (eg, insulators and motor components) also outgas, furth...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/68H01L21/687H01L21/67
CPCH01L21/68H01L21/681H01L21/68764H01L21/68785H01L21/67259H01J37/20H01J2237/2005H01J2237/20221G03F7/70716G03F7/70841H01L21/67017H01L21/68735H01J37/28
Inventor Y·于齐耶尔U·铂尔曼F·拉斯克N·古特曼A·希尔德斯海姆A·巴朗
Owner KLA CORP