Three-degree-of-freedom piezoelectric driving micro-nano positioning platform
A piezoelectric drive, micro-nano positioning technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problem of increasing the driving degree of freedom of the piezoelectric positioning platform , to achieve the effect of increasing the degree of freedom of the drive
Pending Publication Date: 2022-05-17
GUANGZHOU UNIVERSITY
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Problems solved by technology
[0006] The purpose of the present invention is to provide a three-degree-of-freedom piezoelectric-driven micro-nano positioning platform. The problem of increasing the degree of freedom of driving the piezoelectric positioning platform to the working platform under the premise of the number of electric drive units
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[0038] A three-degree-of-freedom piezoelectric-driven micro-nano positioning platform, such as figure 1 and figure 2 shown.
[0039] The three-degree-of-freedom piezoelectric-driven micro-nano positioning platform in this embodiment is processed by wire cutting from an aluminum plate. The base 1 is square, and four corners of the base 1 are provided with fixing holes 101 . The center of the base 1 is the working platform 2, the shape of the working platform 2 is square, the four sides of the working platform 2 are provided with protrusions, and the protrusions are connected with the piezoelectric drive unit 3, and each piezoelectric drive unit 3 passes through the first A flexible hinge 4 is connected with the working platform 2 . The first flexible hinge 4 is composed of two deep-cut elliptical flexible hinges connected in series, such as image 3 As shown; both ends of the first flexible hinge 4 are respectively connected with the piezoelectric drive unit 3 and the work...
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The invention relates to the technical field of piezoelectric driving micro-nano positioning platforms, in particular to a three-degree-of-freedom piezoelectric driving micro-nano positioning platform. Comprising a base, a rotatable working platform is arranged in the center of the base, four piezoelectric driving units are arranged on the periphery of the working platform, and the piezoelectric driving units are connected with the working platform through flexible hinges; the relation among the rotation range theta of the working platform, the eccentric distance e and the maximum driving stroke x of the piezoelectric driving units meets the following formula: the positioning platform changes the positions of the piezoelectric driving units, takes the center line of the working platform as the reference, and translates the four piezoelectric driving units by the eccentric distance e, so that the maximum driving stroke x of the piezoelectric driving units is obtained. The four piezoelectric driving units output driving displacement at the same time, the working platform rotates under clockwise or anticlockwise torque, and the purpose of increasing the driving freedom degree of the working platform is achieved.
Description
technical field [0001] The invention relates to the technical field of piezoelectric-driven micro-nano positioning platforms, in particular to a three-degree-of-freedom piezoelectric-driven micro-nano positioning platform. Background technique [0002] With the development of science and technology, in the fields of industrial production and high-tech, including optical instruments, medical equipment, aerospace, micro-robots and precision mechanical devices, the requirements for high-precision control and micro-nano precision drive technology are increasing. As a key core component of various electromechanical systems, actuators have higher and higher requirements for their structural size and driving positioning accuracy, especially in the field of micro-nano precision drives. Piezoelectric actuators driven by the inverse piezoelectric effect of piezoelectric materials have the advantages of high positioning accuracy, nanoscale displacement resolution, large output force (t...
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IPC IPC(8): H02N2/04H02N2/06H02N2/12H02N2/14
CPCH02N2/001H02N2/005H02N2/0095H02N2/06H02N2/14H02N2/043H02N2/123
Inventor 黄卫清廉钧凯安大伟
Owner GUANGZHOU UNIVERSITY