Communication method and apparatus

Abstract

This invention discloses a communication method and a device, in which, the device includes a master controller, a sub-controller, a communication signal process card and a fiber communication signal process card are communication interface cards mounted on the master controller, every sub-controller includes a circuit used in communication shunt, the master and the sub-controllers are serial to each other by fibers and the method includes: a simple communication protocol is compiled, the master controller initiates all communication orders and assigns a different address code to each sub-controller, which receives the order from the master controller and feeds the received query order to the communication process card by the fiber to increase the usability of fibers.

Description

technical field [0001] The invention relates to a communication method and a communication device, in particular to a communication method and device between controllers. Background technique [0002] With the development of semiconductor integrated circuit technology, the production line has put forward higher requirements for ion implantation equipment. The overall level of the ion implanter is directly affected by the control technology. Therefore, the control system plays a crucial role in the ion implanter. important role. In the process of equipment operation, the main controller needs to exchange data with the sub-controller continuously, the amount of information is very large, and it is very troublesome to process. Most of the efficiency of the main computer is consumed in communication waiting and signal data processing. . The backwardness of the communication method directly determines the backwardness of the control method, which leads to the low efficiency of ...

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Problems solved by technology

In the process of equipment operation, the main controller needs to exchange data with the sub-controller continuously, the amount of information is very large, and it is very troublesome to process. Most of the efficiency of the main computer is consumed in communication waiting and signal data processing.

The backwardness of the communication method directly determines the backwardness of the control method, which leads to the low efficiency of the control system and affects the production efficiency of the whole machine

[0003] Therefore, how to propose a set of high-efficiency communication methods and devices is the need of the ion implanter control system in view of the low communication efficiency and the difficulty in realizing fully automatic control in the distributed control mode adopted in the existing ion implanter. solved problem

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