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Water fog cleaner for scribing machine

A technology of cleaning device and dicing machine, which is applied in the direction of combination device, smoke and dust removal, cleaning method and utensils, etc., can solve problems such as endangering human health, achieve the effect of reducing environmental pollution, preventing accidental injury accidents, and compact structure

Inactive Publication Date: 2007-01-24
SHENYANG ACAD OF INSTR SCI
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AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide a water mist cleaning device for dicing machine, which is compact in structure, small in size, easy to use, significantly reduces manufacturing and maintenance costs, and discharges the mist to the outside after purification and filtration, effectively solving the problem of The water mist in the existing technology endangers human health and brings potential safety hazards, thereby reducing environmental pollution, preventing accidents, significantly improving production efficiency, and prolonging the service life of equipment

Method used

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Embodiment Construction

[0011] according to Figure 1-2 The specific structure of the present invention will be described in detail. The device includes a shell 2 and a cover plate 6 for assembling the shell 2, an air inlet joint 1, an air outlet joint 7, a deposition chamber and the like. Wherein the specifications and sizes of the housing 2 should be installed in the dicing machine casing as required, the air inlet joint 7 communicates with the workpiece processing center through a hose, and the air outlet joint 7 is connected to the sewer pipe outside the dicing machine casing through an exhaust pipe. A front filter screen 3 and a rear filter screen 8 are assembled at the through hole ends of the air inlet joint 1 and the air outlet joint 7 . An axial flow fan 5 is arranged between the front filter screen 3 and the rear filter screen 8 . A water mist condensation plate 4 is arranged between the front filter screen 3 and the axial flow fan 5 , and a lower filter screen 9 is arranged above the con...

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Abstract

The water fog cleaner for scribing machine capable of clearing away water fog and mist produced during the machining includes a casing, a cover plate, an air inlet joint and an air outlet joint. It features the front and the back filtering nets assembled separately before the air inlet joint and the air outlet joint, the axial flow blower before the front and the back filtering nets, the water fog condensing plate between the front filtering net and the axial flow blower, and the lower filtering net on the condensed water hole communicated with the deposition chamber. The present invention has the advantages of compact structure, small size, convenient use, low manufacture and maintenance cost, reduced water fog harm and environment friendship.

Description

technical field [0001] The invention relates to a protective device for ensuring the normal operation of a dicing machine, in particular to a water mist cleaning device for a dicing machine capable of removing generated water vapor and mist during workpiece processing. Background technique [0002] Grinding wheel dicing machine is a very important equipment in the semiconductor production process, mainly used in the production of semiconductor chips, solar cells and other products. When the spindle of the dicing machine is working, the cutter head rotates at a high speed, which makes the cutting oil or coolant sprayed on the cutter atomized quickly, and the workpiece will also produce a large number of particles, which will form a large amount of floating mist containing polychlorinated biphenyls. It can cause headaches, rough skin, redness and swelling. If these mist are attached to the skin, it will make people feel sticky and uncomfortable and corrode the skin; human hea...

Claims

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Application Information

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IPC IPC(8): B23Q11/00B08B15/00B01D50/00
Inventor 马岩余胡平刘荣才周志刚李民李艳丽袁慧珠白宇张明明孙家全鞠仁忠
Owner SHENYANG ACAD OF INSTR SCI
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