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Vacuum suction unit

A vacuum suction and vacuum technology, applied in electrical components, electrical components, conveyor objects, etc., can solve the problem of increasing negative pressure of suction devices, and achieve the effect of stable vacuum fixation and reliable vacuum fixation.

Inactive Publication Date: 2007-03-21
KOGANEI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This judgment method utilizes the phenomenon that if the workpiece is vacuum-fixed to the suction port of the suction device, no outside air will be sucked in from the suction port, thereby increasing the negative pressure in the suction device

Method used

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  • Vacuum suction unit
  • Vacuum suction unit
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Examples

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Embodiment Construction

[0018] Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings.

[0019] Figures 1A and 1B are circuit diagrams showing the pneumatic circuit of a vacuum suction unit according to one embodiment of the present invention, wherein Figure 1A shows the switch position under vacuum supply and Figure 1B shows Toggle position in case of cutoff. As shown in FIG. 1, the vacuum suction unit 10 is connected with a vacuum supply source 11 having a vacuum pump as a vacuum generating source and a positive pressure supply source 12 having a compression pump as a positive pressure generating source, and the vacuum suction unit 10 has a Attachment / detachment flow path 14 to which a suction device 13 such as a vacuum pad is connected. By supplying negative-pressure gas from the vacuum supply source 11 to the attaching / detaching flow passage 14 , the workpiece W is vacuum-adsorbed to the suction device 13 . On the othe...

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PUM

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Abstract

As shown in FIG. 1, a suction device 13 which vacuum-sucks a workpiece W is connected to an attaching / detaching flow path 14. Negative pressure air in a vacuum supply source 11 is supplied to the attaching / detaching flow path 14 via a vacuum supply control valve 15. The vacuum supply control valve 15 is switched to a vacuum-hold position where the negative pressure air is supplied to the attaching / detaching flow path 14 and a rest position where the supply is stopped. A flow rate sensor 29 which detects flow of the air in the attaching / detaching flow path 14 is connected to the attaching / detaching flow path 14. When a detected value of the flow rate sensor 29 is equal to or less than a predetermined judgment value, it is judged that the workpiece W has been vacuum-held.

Description

technical field [0001] The invention relates to a vacuum suction unit provided with a suction device capable of vacuum fixing a workpiece. Background technique [0002] When mounting workpieces such as ICs or LSIs on inspection boards or mounting workpieces that have been inspected on printed circuit boards, conveying devices for conveying workpieces to be set in trays or the like are used. [0003] Among the conveying devices described above, there is a device in which a suction device capable of moving in the Z direction is attached to a transfer head capable of moving in the X and Y directions, and the workpiece is fixed to the suction device under vacuum. The case is transported to the predetermined location. Among the suction devices described above, there is a device capable of supplying a negative pressure in the device and vacuum-fixing a workpiece by a pressure difference between atmospheric pressure and the negative pressure. The opening portion of the airflow pa...

Claims

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Application Information

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IPC IPC(8): B25J15/06H01L21/68H05K13/02H05K13/08B65G47/91H01L21/677H01L21/683H05K13/04
CPCB65G47/917H01L21/6838H05K13/0408H05K13/0409
Inventor 藤原辉彦
Owner KOGANEI