Vacuum evaporation source device of vacuum evaporation machine and its vacuum evaporation method
A technology of evaporation source and evaporation machine, which is applied in the directions of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., and can solve the problems of reducing production efficiency and interruption of manufacturing process, etc.
Active Publication Date: 2010-08-11
AU OPTRONICS CORP
View PDF0 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0002] Please refer to Fig. 1, the existing vacuum evaporation equipment 10 is used to carry out the evaporation manufacturing process to the substrate 20, and the vacuum evaporation equipment 10 includes a cavity 11 and an evaporation machine 12, and the evaporation machine 12 includes a plurality of Evaporation sources 121, 122, 123, 124, and these evaporation sources 121, 122, 123, 124 are arranged in a linear manner in sequence and are hole injection evaporation sources (HIL), hole transport evaporation sources (HTL) ), the electron transport evaporation source (EML) and the electron injection evaporation source (ETL). When the substrate 20 enters the vacuum evaporation equipment 10 in the direction of arrow A, the evaporation machine 12 will perform the evaporation manufacturing process on the substrate 20, Since the existing vapor deposition machine platform does not have a standby vapor deposition source, when the vapor deposition materials 15, 16, 17, 18 in the vapor deposition sources 121, 122, 123, 124 are used up, the cavity 11 must be Open to replace new vapor deposition sources 121, 122, 123, 124 to continue the vapor deposition manufacturing process, because each replacement of new vapor deposition sources 121, 122, 123, 124 must be shut down, so the manufacturing process will be interrupted. Sudden interruption, reducing production efficiency
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0027] In order to make the above and other objects, features, and advantages of the present invention more obvious and understandable, the following specifically cite preferred embodiments with accompanying drawings, which are described in detail as follows.
[0028] 2A, the vacuum evaporation equipment 30 is used to perform an evaporation manufacturing process on the substrate 20. The vacuum evaporation equipment 30 includes a cavity 31 and an evaporation machine 32. The evaporation machine 32 is provided with a plurality of evaporations. Source devices 33, 34, 39, 40 and control circuits 325, 326, evaporation source devices 33, 34, 39, 40 are arranged in a linear manner in sequence and are respectively hole injection evaporation source device (HIL), hole transmission The vapor deposition source device (HTL), the electron transmission vapor deposition source device (EML), and the electron injection vapor deposition source device (ETL). In this embodiment, the vapor deposition so...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a depositing source device and depositing method of vacuum depositing machine, which contains multiple depositing source devices, wherein the each depositing source device concludes depositing source, at least one alternative source and control circuit, wherein the control circuit connects depositing source, at least one alternative source and control circuit; the control circuit connects depositing source and alternative source electrically, which move in different time areas.
Description
Technical field [0001] The invention relates to an evaporation source device of a vacuum evaporation machine and an evaporation method thereof, in particular to an evaporation source device of a vacuum evaporation machine that provides a substrate as an evaporation manufacturing process and an evaporation method thereof ( evaporation module of evaporation machine and evaporation method utilizing the same). Background technique [0002] 1, the existing vacuum evaporation equipment 10 is used to perform an evaporation manufacturing process on a substrate 20. The vacuum evaporation equipment 10 includes a cavity 11 and an evaporation machine 12, and the evaporation machine 12 includes a plurality of The evaporation sources 121, 122, 123, 124, and these evaporation sources 121, 122, 123, 124 are arranged in a linear manner and are respectively a hole injection evaporation source (HIL) and a hole transport evaporation source (HTL). ), electron transmission evaporation source (EML) an...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/54C23C14/06
Inventor 李兴铨
Owner AU OPTRONICS CORP